JPH02133427U - - Google Patents
Info
- Publication number
- JPH02133427U JPH02133427U JP4229689U JP4229689U JPH02133427U JP H02133427 U JPH02133427 U JP H02133427U JP 4229689 U JP4229689 U JP 4229689U JP 4229689 U JP4229689 U JP 4229689U JP H02133427 U JPH02133427 U JP H02133427U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- lid
- vacuum container
- vacuum device
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4229689U JPH02133427U (cs) | 1989-04-10 | 1989-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4229689U JPH02133427U (cs) | 1989-04-10 | 1989-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02133427U true JPH02133427U (cs) | 1990-11-06 |
Family
ID=31553717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4229689U Pending JPH02133427U (cs) | 1989-04-10 | 1989-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02133427U (cs) |
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1989
- 1989-04-10 JP JP4229689U patent/JPH02133427U/ja active Pending