JPH02133282U - - Google Patents

Info

Publication number
JPH02133282U
JPH02133282U JP1989041589U JP4158989U JPH02133282U JP H02133282 U JPH02133282 U JP H02133282U JP 1989041589 U JP1989041589 U JP 1989041589U JP 4158989 U JP4158989 U JP 4158989U JP H02133282 U JPH02133282 U JP H02133282U
Authority
JP
Japan
Prior art keywords
trimmed
substrate
flow path
air flow
vacuum source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989041589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH077034Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989041589U priority Critical patent/JPH077034Y2/ja
Publication of JPH02133282U publication Critical patent/JPH02133282U/ja
Application granted granted Critical
Publication of JPH077034Y2 publication Critical patent/JPH077034Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989041589U 1989-04-07 1989-04-07 レーザトリマ用載物台 Expired - Lifetime JPH077034Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989041589U JPH077034Y2 (ja) 1989-04-07 1989-04-07 レーザトリマ用載物台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989041589U JPH077034Y2 (ja) 1989-04-07 1989-04-07 レーザトリマ用載物台

Publications (2)

Publication Number Publication Date
JPH02133282U true JPH02133282U (enrdf_load_html_response) 1990-11-06
JPH077034Y2 JPH077034Y2 (ja) 1995-02-22

Family

ID=31552383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989041589U Expired - Lifetime JPH077034Y2 (ja) 1989-04-07 1989-04-07 レーザトリマ用載物台

Country Status (1)

Country Link
JP (1) JPH077034Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH077034Y2 (ja) 1995-02-22

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