JPH02133282U - - Google Patents
Info
- Publication number
- JPH02133282U JPH02133282U JP1989041589U JP4158989U JPH02133282U JP H02133282 U JPH02133282 U JP H02133282U JP 1989041589 U JP1989041589 U JP 1989041589U JP 4158989 U JP4158989 U JP 4158989U JP H02133282 U JPH02133282 U JP H02133282U
- Authority
- JP
- Japan
- Prior art keywords
- trimmed
- substrate
- flow path
- air flow
- vacuum source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989041589U JPH077034Y2 (ja) | 1989-04-07 | 1989-04-07 | レーザトリマ用載物台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989041589U JPH077034Y2 (ja) | 1989-04-07 | 1989-04-07 | レーザトリマ用載物台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02133282U true JPH02133282U (cs) | 1990-11-06 |
| JPH077034Y2 JPH077034Y2 (ja) | 1995-02-22 |
Family
ID=31552383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989041589U Expired - Lifetime JPH077034Y2 (ja) | 1989-04-07 | 1989-04-07 | レーザトリマ用載物台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH077034Y2 (cs) |
-
1989
- 1989-04-07 JP JP1989041589U patent/JPH077034Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH077034Y2 (ja) | 1995-02-22 |