JPH02132939U - - Google Patents
Info
- Publication number
- JPH02132939U JPH02132939U JP4279089U JP4279089U JPH02132939U JP H02132939 U JPH02132939 U JP H02132939U JP 4279089 U JP4279089 U JP 4279089U JP 4279089 U JP4279089 U JP 4279089U JP H02132939 U JPH02132939 U JP H02132939U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- permanent magnet
- magnet holder
- diffusion chamber
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4279089U JPH0723957Y2 (ja) | 1989-04-11 | 1989-04-11 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4279089U JPH0723957Y2 (ja) | 1989-04-11 | 1989-04-11 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02132939U true JPH02132939U (zh) | 1990-11-05 |
| JPH0723957Y2 JPH0723957Y2 (ja) | 1995-05-31 |
Family
ID=31554639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4279089U Expired - Fee Related JPH0723957Y2 (ja) | 1989-04-11 | 1989-04-11 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0723957Y2 (zh) |
-
1989
- 1989-04-11 JP JP4279089U patent/JPH0723957Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0723957Y2 (ja) | 1995-05-31 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |