JPH02132939U - - Google Patents

Info

Publication number
JPH02132939U
JPH02132939U JP4279089U JP4279089U JPH02132939U JP H02132939 U JPH02132939 U JP H02132939U JP 4279089 U JP4279089 U JP 4279089U JP 4279089 U JP4279089 U JP 4279089U JP H02132939 U JPH02132939 U JP H02132939U
Authority
JP
Japan
Prior art keywords
plasma
permanent magnet
magnet holder
diffusion chamber
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4279089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0723957Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4279089U priority Critical patent/JPH0723957Y2/ja
Publication of JPH02132939U publication Critical patent/JPH02132939U/ja
Application granted granted Critical
Publication of JPH0723957Y2 publication Critical patent/JPH0723957Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electron Sources, Ion Sources (AREA)
JP4279089U 1989-04-11 1989-04-11 プラズマ処理装置 Expired - Fee Related JPH0723957Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4279089U JPH0723957Y2 (ja) 1989-04-11 1989-04-11 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4279089U JPH0723957Y2 (ja) 1989-04-11 1989-04-11 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH02132939U true JPH02132939U (cs) 1990-11-05
JPH0723957Y2 JPH0723957Y2 (ja) 1995-05-31

Family

ID=31554639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4279089U Expired - Fee Related JPH0723957Y2 (ja) 1989-04-11 1989-04-11 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0723957Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119111620A (zh) * 2024-09-02 2024-12-13 哈尔滨商业大学 一种冷等离子体果蔬保鲜杀菌系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119111620A (zh) * 2024-09-02 2024-12-13 哈尔滨商业大学 一种冷等离子体果蔬保鲜杀菌系统

Also Published As

Publication number Publication date
JPH0723957Y2 (ja) 1995-05-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees