JPH02132935U - - Google Patents

Info

Publication number

JPH02132935U

JPH02132935U JP4117989U JP4117989U JPH02132935U JP H02132935 U JPH02132935 U JP H02132935U JP 4117989 U JP4117989 U JP 4117989U JP 4117989 U JP4117989 U JP 4117989U JP H02132935 U JPH02132935 U JP H02132935U

Authority

JP

Japan

Prior art keywords

vapor phase

phase growth

reactor

growth apparatus

showing

Prior art date

1989-04-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000001947 vapour-phase growth Methods 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 2
• 239000007789 gas Substances 0.000 claims 2
• 239000012495 reaction gas Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
• RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
• 229910000070 arsenic hydride Inorganic materials 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1