JPH02132356A - Water detecting element - Google Patents
Water detecting elementInfo
- Publication number
- JPH02132356A JPH02132356A JP28587888A JP28587888A JPH02132356A JP H02132356 A JPH02132356 A JP H02132356A JP 28587888 A JP28587888 A JP 28587888A JP 28587888 A JP28587888 A JP 28587888A JP H02132356 A JPH02132356 A JP H02132356A
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- fluoride
- chloride
- intercalation compound
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 61
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 56
- 239000010439 graphite Substances 0.000 claims abstract description 56
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims abstract description 22
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims abstract description 20
- 230000002687 intercalation Effects 0.000 claims description 28
- 238000009830 intercalation Methods 0.000 claims description 28
- 150000001875 compounds Chemical class 0.000 claims description 26
- 238000009413 insulation Methods 0.000 abstract description 13
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 abstract description 12
- 230000006866 deterioration Effects 0.000 abstract description 11
- 238000006243 chemical reaction Methods 0.000 abstract description 9
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 abstract description 3
- 229910017049 AsF5 Inorganic materials 0.000 abstract description 2
- 239000004215 Carbon black (E152) Substances 0.000 abstract description 2
- YBGKQGSCGDNZIB-UHFFFAOYSA-N arsenic pentafluoride Chemical compound F[As](F)(F)(F)F YBGKQGSCGDNZIB-UHFFFAOYSA-N 0.000 abstract description 2
- 229930195733 hydrocarbon Natural products 0.000 abstract description 2
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 2
- 230000008595 infiltration Effects 0.000 abstract 2
- 238000001764 infiltration Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 7
- 230000015556 catabolic process Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 150000001805 chlorine compounds Chemical class 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 150000002222 fluorine compounds Chemical class 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229940125904 compound 1 Drugs 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QGOSZQZQVQAYFS-UHFFFAOYSA-N krypton difluoride Chemical compound F[Kr]F QGOSZQZQVQAYFS-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
ｌ東上立且１豆■
本発明は、水分検知素子に関し、さらに詳し《は、グラ
ファイト層間化合物を用いた水蒸気、露等の過飽和水分
の検知に適した水分検知素子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moisture detection element, and more particularly, to a moisture detection element suitable for detecting supersaturated moisture such as water vapor and dew using a graphite intercalation compound. .
本発明の水分検知素子は、例えば、ＣＶケーブルの絶縁
劣化ないし絶縁破壊につながる水分の侵入を通電状態の
ままで検知する素子として好適に使用することができる
。The moisture detection element of the present invention can be suitably used, for example, as an element that detects the intrusion of moisture that may lead to insulation deterioration or breakdown of a CV cable while it is in an energized state.
良米至弦ｌ
従来、吸湿や付着水分などによる絶縁体の絶縁性低下、
例えば、Ｃ■ケーブルのポリ塩化ビニルｍ脂（ＰＶＣ）
シースへの水の侵入による絶縁劣化を検知する方法とし
ては、半年ないし１年毎の定期点検時に、一旦、電力の
供給を止めてから絶縁層に直流電圧を印加し、その漏れ
電流を測定する方法が知られている。In the past, insulation properties of insulators deteriorated due to moisture absorption and adhering moisture.
For example, polyvinyl chloride m resin (PVC) of C cable
A method for detecting insulation deterioration due to water intrusion into the sheath is to temporarily stop the power supply, apply DC voltage to the insulation layer, and measure the leakage current during periodic inspections every six months or one year. method is known.
この漏れ電流は、通常、数μＡから、最大でも数ｍＡの
大きさであり、いわゆる活綿（通電）下では検知できず
、前述のように、無通電時にしか測定することができな
かった。したがって、従来、活線下で絶縁劣化を検知す
る方法はなかった。This leakage current usually has a magnitude of several microamperes to several milliamperes at most, and cannot be detected under so-called live cotton (energized) conditions, and can only be measured when no current is applied, as described above. Therefore, conventionally there has been no method for detecting insulation deterioration under live wires.
また、絶縁劣化または絶縁破壊の原因となる水分の侵入
を検知する方法についても適当なものがなかった６
このように、従来、Ｃｖケーブルの絶縁劣化の進行を検
知するには、定期点検時に、一旦、通電を止めてから絶
縁層に直流電圧を印加し、漏れ電流を測定する方法によ
っていたため、絶縁劣化を初期の段階で発見することが
出来ず、絶縁劣化からやがて絶縁破壊に至るなど損害が
広がるという問題があった。In addition, there was no suitable method for detecting the intrusion of moisture, which can cause insulation deterioration or dielectric breakdown.6 In this way, conventionally, in order to detect the progression of insulation deterioration in Cv cables, during periodic inspections, Because the method used was to apply a DC voltage to the insulating layer after the current was turned off and measure the leakage current, insulation deterioration could not be detected at an early stage, resulting in damage such as insulation deterioration which eventually led to dielectric breakdown. The problem was that it was spreading.
が ゛しようとする 題
本発明の目的は、活線下のＣ■ケーブルで、常時、水の
侵入を監視し得る水分検知素子を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a moisture detection element that can constantly monitor water intrusion in a C-cable under a live wire.
さらに、本発明の目的は、一般に水分の侵入、吸着等が
問題となる物品や雰囲気のための水分検知素子を提供す
ることにある。A further object of the present invention is to provide a moisture sensing element for articles and atmospheres where moisture intrusion, adsorption, etc. are generally a problem.
本発明者は、従来技術の有する問題点を解決するために
鋭意研究した結果、層状構造を有するグラファイト層間
に、塩化物またはフッ化物を挿入（インターカレーショ
ン）したグラファイト層間化合物が極めて高い電気伝導
率（電導度）を示すけれども、水分と接触することによ
り電導度が急低下することに着目し、このグラファイト
層間化合物が水分検知素子として利用可能であることを
見出した。本発明は、その知見に基づいて完成するに至
ったものである。As a result of intensive research to solve the problems of the prior art, the present inventor discovered that a graphite intercalation compound in which chloride or fluoride is inserted (intercalated) between graphite layers having a layered structure has extremely high electrical conductivity. However, they focused on the fact that the conductivity suddenly decreases when they come into contact with moisture, and discovered that this graphite intercalation compound can be used as a moisture sensing element. The present invention has been completed based on this knowledge.
を るための
すなわち、本発明によれば、層状構造を有するグラファ
イト層間に、塩化物またはフッ化物を挿入したグラファ
イト層間化合物からなることを特徴とする水分検知素子
が提供される。According to the present invention, there is provided a moisture sensing element characterized by being made of a graphite intercalation compound in which chloride or fluoride is inserted between graphite layers having a layered structure.
本発明の水分検知素子に電極端子を取り付け、電導度の
変化を検出し得るように構成すれば、水分検知装置を形
成することができる。A moisture detection device can be formed by attaching electrode terminals to the moisture detection element of the present invention and configuring it to detect changes in conductivity.
以下、本発明の構成要素について詳述する。Hereinafter, the constituent elements of the present invention will be explained in detail.
（グラファイト）
グラファイトは、周知のように炭素六員環の二次元網目
構造の層が積み重なった層状構造を有している。この層
状構造を有するグラファイト層間に、原子やイオンなど
を挿入（インター力レーション）することにより層間化
合物を得ることができる。(Graphite) As is well known, graphite has a layered structure in which layers of a two-dimensional network structure of six-membered carbon rings are stacked. An intercalation compound can be obtained by inserting atoms, ions, etc. between the graphite layers having this layered structure (interaction).
本発明において母材として使用するグラファイトの種類
および形状は、特に限定されず、水分検知素子の仕様態
様により適宜選択される。The type and shape of graphite used as a base material in the present invention are not particularly limited, and are appropriately selected depending on the specifications of the moisture sensing element.
グラファイトは、工業的に製造されたものを使用できる
が、純度の高い、均一な厚みを有するグラファイト膜を
得るには、プラズマＣ’ＶＤ法により、反応ガスとして
ベンゼンなどの炭化水素を用い、基板上に炭素膜を蒸着
し、次いで熱処理を行なってグラファイト膜を得る方法
が好適である。Industrially produced graphite can be used, but in order to obtain a graphite film with high purity and a uniform thickness, a plasma C'VD method is used, using a hydrocarbon such as benzene as a reaction gas, and A preferred method is to deposit a carbon film thereon and then perform heat treatment to obtain a graphite film.
（塩化物およびフッ化物）
本発明においては、層間に挿入する物質として塩化物ま
たはフッ化物を使用する。(Chloride and Fluoride) In the present invention, chloride or fluoride is used as a substance to be inserted between layers.
１化１
グラファイト層間に挿入される塩化物としては、例えば
、Ｃ ｕ Ｃ ｊ２ ｚ、Ａ ｕ Ｃ Ａ ｓ、Ｍ ｇ
Ｃ ｊ２ ２、ＺｎＣｊ２２、ＣｄＣｊ２２、Ｈ ｇ
Ｃ Ａ ２、ＡρＣρ３，Ｇ ａ Ｃ Ａ ａ、Ｉ
ｎ Ｃ Ｉ２ａ、Ｔｎｃｇｉ、Ｚ ｒ Ｃ ４２ ４、
ＨｆＣｆｌ．、ｓｂｃＩ２６．Ｎｂｃｇｓ、Ｔ ａ Ｃ
ｊ２ ａ、ＣｒＣρ３． Ｍ Ｏ Ｃ ℃５． Ｗ
Ｃ ｊ２ ａ、Ｍ ｎ Ｃρ２、Ｒ ｅ Ｃ ９ ４、
ＦｅＣｊ２２、Ｆ ｅ Ｃ １２ ｓ、Ｃ ｏ Ｃ ４
２ ２、Ｎ ｉ Ｃ Ｉｌ＝ ２、Ｒ ｎ Ｃ ４２
ａ、Ｏ ｓ Ｃ １２ ３、ＰｄＣＩ２．２、Ｐ ｔ
Ｃ Ａ ４、Ｕ Ｃ １２ ｓ、Ｅ ｕ Ｃ ｊ２ ａ
、ＧｄＣＩ２．Ｔ ｂ Ｃ Ｉ２ ３、Ｄ ｙ Ｃ
４２ ｓ、Ｈ ｏ Ｃ ｊ２ ３、Ｅ ｒ
Ｃ Ｑ ａＴ ｍ Ｃ ｊ２ ｓ．Ｙ
ｂ Ｃ Ｉ２ ３、Ｌ ｕ Ｃ ４２ ｓ
．Ｙ Ｃ （！． ３、Ｉ Ｃｊ２ ２、Ｂ
ｒ Ｃ ｊ２ ｓ、Ｓ ｃ Ｃ Ｉ２
ｎ、Ｔ ｉ Ｃ ４２ ４、Ｓ ｎ Ｃ
ｊ２ ４、Ｓ ｉ Ｃ Ａ ４、Ｂ
ｅ Ｃ ４２ ２、ＢＣｊ２．、ＢｉＣβ３等が
挙げられる。Examples of chlorides inserted between graphite layers include C u C j2 z, A u C A s, M g
C j2 2, ZnCj22, CdCj22, H g
C A 2, AρCρ3, G a C A a, I
n C I2a, Tncgi, Z r C 42 4,
HfCfl. , sbcI26. Nbcgs, T a C
j2 a, CrCρ3. M O C ℃5. W
C j2 a, M n Cρ2, R e C 9 4,
FeCj22, FeC12s, CoC4
2 2, N i C Il= 2, R n C 42
a, O s C 12 3, PdCI2.2, P t
C A 4, U C 12 s, E u C j2 a
, GdCI2. T b C I2 3, D y C
42 s, H o C j2 3, E r
C Q aT m C j2 s. Y
b CI2 3, L u C 42 s
．． Y C (!. 3, I Cj2 2, B
r C j2 s, S c C I2
n, T i C 42 4, S n C
j2 4, S i C A 4, B
e C 42 2, BCj2. , BiCβ3, etc.
これらの塩化物の中でもＩＣρが、感度の点で特に好ま
しい。また、これらの塩化物は２種以上を組合わせて使
用してもよい。Among these chlorides, ICρ is particularly preferred in terms of sensitivity. Moreover, these chlorides may be used in combination of two or more types.
１Ｌ北１
グラファイト層間に挿入されるフッ化物としては、例え
ば、Ａ ｓ Ｆ ５、ＳｂＦＳ、Ｔ’ｉＦ＜、ＰＦ８、
Ｎ ｂ Ｆ ａ、Ｔ ａ Ｆ ｓ、Ｍ ｃ） Ｆ ６、
ＷＦ６、Ｏ ｓ Ｆ ａ、ＵＦ．、Ｒ ｅ Ｆ ｓ、Ｉ
ｒ Ｆ ｅ、ＰｔＦａ、Ｓ Ｉ Ｆ ４、Ｇ ｅ Ｆ
４、Ｂ ｒ Ｆ ｓ、ＩＰ．、Ｃｊ２Ｆ．ｓ、Ｘ ｅ
Ｏ Ｆ ４、Ｘ ｅ Ｆ ａ、Ｘ ｅ Ｆ ４、Ｘ
ｅ Ｆ ２、Ｋ ｒ Ｆ ２、Ｆ２等が挙げられる。1L Kita 1 Fluorides inserted between graphite layers include, for example, AsF5, SbFS, T'iF<, PF8,
N b F a, T a F s, M c) F 6,
WF6, OsFa, UF. , R e F s, I
r F e, PtFa, S I F 4, G e F
4, B r F s, IP. , Cj2F. s, X e
O F 4, X e F a, X e F 4, X
Examples include eF2, KrF2, F2, and the like.
これらのフッ化物の中でもＡ ｓ Ｆ ｓが、感度の点
で特に好ましい。Among these fluorides, A s F s is particularly preferred in terms of sensitivity.
（グラファイト層間化合物の製造）
上記塩化物またはフッ化物のグラファイト層間への挿入
は、従来からの周知かつ慣用の方法により行なうことが
できる。(Production of graphite intercalation compound) The above-mentioned chloride or fluoride can be inserted into the graphite interlayers by a conventionally well-known and commonly used method.
例えば、グラファイトを設置した反応槽を真空排気した
後、室温にて、塩化物またはフッ化物蒸気を導入するこ
とにより、あるいはグラファイトと塩化物またはフッ化
物を反応槽内に共存させ、真空排気した後、加熱するこ
とにより調製することができる。また、グラファイトと
塩素ガスまたはフッ素ガスを共存させる方法もある。な
お、フッ化物は、おおむね蒸気圧が高いためフッ化物蒸
気を導入する気相法が好ましい。For example, by evacuating a reaction tank containing graphite and then introducing chloride or fluoride vapor at room temperature, or by allowing graphite and chloride or fluoride to coexist in the reaction tank and then evacuating it. , can be prepared by heating. There is also a method of coexisting graphite with chlorine gas or fluorine gas. Note that, since fluoride generally has a high vapor pressure, a gas phase method in which fluoride vapor is introduced is preferred.
塩化物またはフッ化物のグラファイト層間への挿入量は
、グラファイト層間化合物の所望の伝導度に応じて適宜
定めることができる。通常、得られるグラファイト層間
化合物の電導度が、グラファイトと比較して数倍から士
数倍になる程度に挿入する。The amount of chloride or fluoride inserted between the graphite layers can be appropriately determined depending on the desired conductivity of the graphite intercalation compound. Usually, it is inserted to such an extent that the electrical conductivity of the obtained graphite intercalation compound is several times to several times that of graphite.
作−一川
グラファイトは、塩化物またはフッ化物を層間に挿入す
ることにより、電導度が数倍〜士数倍増大し、電導度１
０ ’ Ｓ／ｃｍ〜１ ０ ＢＳ／ｃｍと金属的な導
電性を示す。By inserting chloride or fluoride between the layers of Ichikawa graphite, the electrical conductivity increases several times to several times, and the electrical conductivity reaches 1.
It exhibits metallic conductivity of 0' S/cm to 10 BS/cm.
ところが、塩化物またはフッ化物を層間に挿入したグラ
ファイト層間化合物は、水分が接触すると、主として層
間に挿入した塩化物またはフッ化物の加水分解や溶解が
生じ、その結果、電導度が数分の一から十数分の一に急
変する。However, when a graphite intercalation compound with chloride or fluoride intercalated between the layers comes in contact with moisture, the chloride or fluoride intercalated between the layers is mainly hydrolyzed or dissolved, and as a result, the electrical conductivity decreases to a fraction of what it is. It suddenly changes from 1/10 to 1/10.
そこで、これらのグラファイト層間化合物を検知素子と
して使用し、その電導度の変化をモニターすれば、水分
の有無を高感度で検知することができる。Therefore, by using these graphite intercalation compounds as sensing elements and monitoring changes in their electrical conductivity, the presence or absence of moisture can be detected with high sensitivity.
具体的には、前記方法で得られたグラファイト層間化合
物を大気中で安定化した後、四端子法等の従来からの慣
用の電導度測定法にしたがって電極等を取りつけること
により、水分検知素子として用いることができる。ただ
し、電極等は、塩化物またはフッ化物の層間挿入前に、
グラファイトに取りつけることもできる。Specifically, after stabilizing the graphite intercalation compound obtained by the above method in the atmosphere, it can be used as a moisture sensing element by attaching electrodes etc. according to conventional conductivity measurement methods such as the four-terminal method. Can be used. However, before interlayer insertion of chloride or fluoride, electrodes, etc.
It can also be attached to graphite.
上記のようにして得られた、塩化物またはフッ化物を層
間に挿入したグラファイト層間化合物からなる水分検知
素子を、例えば、Ｃ■ケーブルのシース上層に取りつけ
、電導度をモニターしておくことにより、従来なし得な
かった活線下での水分侵入検知を即座に行なうことがで
きる。また、その他水分の有無を検知する必要のある多
《の用途に用いることができる。By attaching the moisture sensing element made of the graphite intercalation compound obtained as described above and having chloride or fluoride intercalated between the layers, for example, to the upper layer of the sheath of the C■ cable and monitoring the conductivity, It is now possible to immediately detect moisture intrusion under live wires, which was previously impossible. In addition, it can be used in many other applications where it is necessary to detect the presence or absence of moisture.
支−一■一一ｌ
以下、本発明について実施例を挙げて具体的に説明する
が、本発明はこれらの実施例のみに限定されるものでは
ない。Support-1■11l The present invention will be specifically described below with reference to Examples, but the present invention is not limited only to these Examples.
［実施例１］
外部電極型ＲＦプラズマＣＶＤ装置内の反応領域に、Ｓ
ＵＳ３０４製の基板を設薄し、１０００℃に加熱する。[Example 1] In the reaction area of an external electrode type RF plasma CVD apparatus, S
A substrate made of US304 is thinned and heated to 1000°C.
次いで、反応領域にベンゼンをＩＴ ｏｒｒの圧力で投
入する。そして、４０Ｗの出力でプラズマ・を印加（１
３．５６ＭＨｚ ）Ｌ、ＳＵＳ３０４製基板上に３時
間蒸着を行なって炭素膜を形成した。これを、電気炉に
て、３０００℃の熱処理を施し、グラファイト膜（厚み
２０ＬＬｍ）を得た。Then, benzene is introduced into the reaction zone at a pressure of IT orr. Then, plasma was applied with an output of 40W (1
3.56 MHz) L, and a carbon film was formed on a substrate made of SUS304 by vapor deposition for 3 hours. This was heat-treated at 3000° C. in an electric furnace to obtain a graphite film (thickness: 20 LLm).
次に、このグラファイト膜を反応槽に設置し、十分に窒
素パージおよびベーキングを行なった後、５ Ｘ １
０−”Ｔｏｒｒまで真空排気した。ついで、これに室温
で、ＩＣＪ２蒸気を導入（圧力２ ０ Ｔｏｒｒ）して
、４日間反応（層間挿入）させ、グラファイト層間化合
物を得た。Next, this graphite membrane was placed in a reaction tank, and after thorough nitrogen purging and baking, 5 x 1
It was evacuated to 0-'' Torr. Then, ICJ2 vapor was introduced (pressure 20 Torr) at room temperature, and a reaction (intercalation) was carried out for 4 days to obtain a graphite intercalation compound.
減圧排気してからグラファイト層間化合物を大気中に取
り出し、安定化した後、第１図に示すとおり、膜状のグ
ラファイト層間化合物１に、力一ボンペーストにより四
端子電極２を形成した。リード線３は白金線を使用した
。また、常法により定電流電源４、電圧計５および電流
計６を接続し、電導度およびその変化を測定できるよう
構成した。After evacuation and evacuation, the graphite intercalation compound was taken out into the atmosphere and stabilized. As shown in FIG. 1, a four-terminal electrode 2 was formed on the film-like graphite intercalation compound 1 using a force-bonding paste. Lead wire 3 used platinum wire. Further, a constant current power source 4, a voltmeter 5, and an ammeter 6 were connected in a conventional manner, so that the conductivity and its changes could be measured.
このＩＣβ挿入グラファイト層間化合物の電導度は、１
． ５Ｘ １ ０’ Ｓ／ｃｍであった。The electrical conductivity of this ICβ inserted graphite intercalation compound is 1
．． It was 5×10′ S/cm.
このグラファイト層間化合物に、スボイドにより水を数
滴たらしたところ電導度は、４Ｘ１０’Ｓ／ｃｍと急激
に低下した。When a few drops of water were added to this graphite intercalation compound using a suvoid, the electrical conductivity rapidly decreased to 4×10'S/cm.
したがって、上記のようにして得られる電気伝導率測定
用電極を形成したグラファイト層間化合物を、例えば、
Ｃ■ケーブルのシース外層付近に取りつけることにより
、活線下においても、水の侵入を高感度で検知し、絶縁
劣化の有無を即座に検出することができ、ケーブルの信
頼性を増すことができる。Therefore, the graphite intercalation compound forming the electrode for measuring electrical conductivity obtained as described above, for example,
C ■By installing near the outer layer of the cable sheath, it is possible to detect water intrusion with high sensitivity even under live wires, and immediately detect the presence or absence of insulation deterioration, increasing the reliability of the cable. .
［実施例２］
実施例１と同様にして、外部電極型ＲＦプラズマＣＶＤ
装置により、反応ガスとしてベンゼンを使用してグラフ
ァイト膜（厚み２５μｍ）を得た。[Example 2] External electrode type RF plasma CVD was carried out in the same manner as in Example 1.
A graphite film (thickness: 25 μm) was obtained using the apparatus using benzene as a reaction gas.
次に、このグラファイト膜を反応槽に設置し、十分に窒
素パージおよびペーキングを行なった後、２ Ｘ １
０−２Ｔｏｒｒまで真空排気した。ついで、これに室温
でＡ ｓ Ｆ ｓを導入（圧力６ ０ ０ Ｔｏｒｒ）
して２週間反応（層間挿入）させ、グラファイト層間化
合物を得た。Next, this graphite membrane was placed in a reaction tank, and after thorough nitrogen purging and pacing, 2 x 1
It was evacuated to 0-2 Torr. Then, A s F s was introduced into this at room temperature (pressure 600 Torr).
A reaction (intercalation) was carried out for two weeks to obtain a graphite intercalation compound.
減圧排気してからグラファイト層間化合物を大気中に取
り出し、安定化した後、実施例１と同様にして、膜状の
グラファイト層間化合物にカーボンペーストにより四端
子電極を形成し、電導度を測定できるよう構成した。After the graphite intercalation compound was evacuated to the atmosphere and stabilized, a four-terminal electrode was formed using carbon paste on the film-like graphite intercalation compound in the same manner as in Example 1, so that the conductivity could be measured. Configured.
このＡ ｓ Ｆ ＠挿入グラファイト層間化合物の電導
度は、２ Ｘ １ ０ ＠Ｓ／ｃｍであった。The conductivity of this A s F @ intercalated graphite intercalation compound was 2×10 @S/cm.
このグラファイト層間化合物に、スボイドにより水を数
滴たらしたところ電導度は、５Ｘ１０’Ｓ／ｃｍと急激
に低下した。When a few drops of water were added to this graphite intercalation compound using a suvoid, the electrical conductivity rapidly decreased to 5×10'S/cm.
したがって、このグラファイト層間化合物もまた水分検
知素子として好適に使用できる。Therefore, this graphite intercalation compound can also be suitably used as a moisture sensing element.
Ａ吋夏力】
塩化物またはフッ化物を層間に挿入したグラファイト層
間化合物を水分検知素子として使用することにより、活
線下でのＣｖケーブルの水侵入による絶縁劣化ないし絶
縁破壊の監視が可能となる。また、その他、水侵入の監
視を必要とする様々の用途に適用することができる。本
発明により、例えば、Ｃ■ケーブルの絶縁劣化ないし絶
縁破壊による事故や損害の拡大の防止または低減、信頼
性の向上等、著しい効果を奏する。By using a graphite interlayer compound with chloride or fluoride intercalated between the layers as a moisture detection element, it becomes possible to monitor insulation deterioration or breakdown due to water intrusion into Cv cables under live wires. . In addition, it can be applied to various other uses that require monitoring of water intrusion. The present invention brings about significant effects, such as preventing or reducing the spread of accidents and damage due to insulation deterioration or breakdown of the C■ cable, and improving reliability.
第１図は、本発明の水分検知素子と電気伝導率測定系を
示す略図である。
１：塩化物またはフッ化物を層間に挿入した（膜状）グ
ラファイト層間化合物
２：電極端子
３：リード線
４：定電流電源
５：電圧計
６：電流計FIG. 1 is a schematic diagram showing a moisture sensing element and an electrical conductivity measurement system of the present invention. 1: Graphite intercalation compound (film-like) with chloride or fluoride inserted between the layers 2: Electrode terminal 3: Lead wire 4: Constant current power source 5: Voltmeter 6: Ammeter
Claims (2)
たはフッ化物を挿入したグラファイト層間化合物からな
ることを特徴とする水分検知素子。(1) A moisture sensing element comprising a graphite intercalation compound in which chloride or fluoride is inserted between graphite layers having a layered structure.
る請求項１記載の水分検知素子。（３）グラファイト層
間に挿入したフッ化物がＡｓＦ＿５である請求項１記載
の水分検知素子。(2) The moisture sensing element according to claim 1, wherein the chloride inserted between the graphite layers is ICl. (3) The moisture sensing element according to claim 1, wherein the fluoride inserted between the graphite layers is AsF_5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28587888A JPH02132356A (en) | 1988-11-14 | 1988-11-14 | Water detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28587888A JPH02132356A (en) | 1988-11-14 | 1988-11-14 | Water detecting element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132356A true JPH02132356A (en) | 1990-05-21 |
Family
ID=17697197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28587888A Pending JPH02132356A (en) | 1988-11-14 | 1988-11-14 | Water detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132356A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011134598A (en) * | 2009-12-24 | 2011-07-07 | Toyota Motor Corp | Method and apparatus for detecting moisture of solid battery, and method for manufacturing the solid battery |
-
1988
- 1988-11-14 JP JP28587888A patent/JPH02132356A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011134598A (en) * | 2009-12-24 | 2011-07-07 | Toyota Motor Corp | Method and apparatus for detecting moisture of solid battery, and method for manufacturing the solid battery |
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