JPH02131559U - - Google Patents
Info
- Publication number
- JPH02131559U JPH02131559U JP3753789U JP3753789U JPH02131559U JP H02131559 U JPH02131559 U JP H02131559U JP 3753789 U JP3753789 U JP 3753789U JP 3753789 U JP3753789 U JP 3753789U JP H02131559 U JPH02131559 U JP H02131559U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- crucible
- quartz
- jig
- larger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3753789U JPH02131559U (en, 2012) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3753789U JPH02131559U (en, 2012) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131559U true JPH02131559U (en, 2012) | 1990-11-01 |
Family
ID=31544740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3753789U Pending JPH02131559U (en, 2012) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131559U (en, 2012) |
-
1989
- 1989-03-31 JP JP3753789U patent/JPH02131559U/ja active Pending