JPH02131342U - - Google Patents

Info

Publication number
JPH02131342U
JPH02131342U JP4036589U JP4036589U JPH02131342U JP H02131342 U JPH02131342 U JP H02131342U JP 4036589 U JP4036589 U JP 4036589U JP 4036589 U JP4036589 U JP 4036589U JP H02131342 U JPH02131342 U JP H02131342U
Authority
JP
Japan
Prior art keywords
wafer
positioning jig
holding plate
unevenness
contacts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4036589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4036589U priority Critical patent/JPH02131342U/ja
Publication of JPH02131342U publication Critical patent/JPH02131342U/ja
Pending legal-status Critical Current

Links

JP4036589U 1989-04-04 1989-04-04 Pending JPH02131342U (US07642317-20100105-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4036589U JPH02131342U (US07642317-20100105-C00010.png) 1989-04-04 1989-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4036589U JPH02131342U (US07642317-20100105-C00010.png) 1989-04-04 1989-04-04

Publications (1)

Publication Number Publication Date
JPH02131342U true JPH02131342U (US07642317-20100105-C00010.png) 1990-10-31

Family

ID=31550091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4036589U Pending JPH02131342U (US07642317-20100105-C00010.png) 1989-04-04 1989-04-04

Country Status (1)

Country Link
JP (1) JPH02131342U (US07642317-20100105-C00010.png)

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