JPH02131333U - - Google Patents
Info
- Publication number
- JPH02131333U JPH02131333U JP3972089U JP3972089U JPH02131333U JP H02131333 U JPH02131333 U JP H02131333U JP 3972089 U JP3972089 U JP 3972089U JP 3972089 U JP3972089 U JP 3972089U JP H02131333 U JPH02131333 U JP H02131333U
- Authority
- JP
- Japan
- Prior art keywords
- identification number
- optical sensor
- wafer carrier
- wafers
- display means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000000969 carrier Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3972089U JPH02131333U (OSRAM) | 1989-04-03 | 1989-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3972089U JPH02131333U (OSRAM) | 1989-04-03 | 1989-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131333U true JPH02131333U (OSRAM) | 1990-10-31 |
Family
ID=31548880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3972089U Pending JPH02131333U (OSRAM) | 1989-04-03 | 1989-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131333U (OSRAM) |
-
1989
- 1989-04-03 JP JP3972089U patent/JPH02131333U/ja active Pending
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