JPH02131142U - - Google Patents

Info

Publication number
JPH02131142U
JPH02131142U JP3891089U JP3891089U JPH02131142U JP H02131142 U JPH02131142 U JP H02131142U JP 3891089 U JP3891089 U JP 3891089U JP 3891089 U JP3891089 U JP 3891089U JP H02131142 U JPH02131142 U JP H02131142U
Authority
JP
Japan
Prior art keywords
clean room
piping
air flow
ceiling
visualization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3891089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3891089U priority Critical patent/JPH02131142U/ja
Publication of JPH02131142U publication Critical patent/JPH02131142U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP3891089U 1989-03-31 1989-03-31 Pending JPH02131142U (US07943777-20110517-C00090.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3891089U JPH02131142U (US07943777-20110517-C00090.png) 1989-03-31 1989-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3891089U JPH02131142U (US07943777-20110517-C00090.png) 1989-03-31 1989-03-31

Publications (1)

Publication Number Publication Date
JPH02131142U true JPH02131142U (US07943777-20110517-C00090.png) 1990-10-31

Family

ID=31547340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3891089U Pending JPH02131142U (US07943777-20110517-C00090.png) 1989-03-31 1989-03-31

Country Status (1)

Country Link
JP (1) JPH02131142U (US07943777-20110517-C00090.png)

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