JPH02129730U - - Google Patents
Info
- Publication number
- JPH02129730U JPH02129730U JP3908589U JP3908589U JPH02129730U JP H02129730 U JPH02129730 U JP H02129730U JP 3908589 U JP3908589 U JP 3908589U JP 3908589 U JP3908589 U JP 3908589U JP H02129730 U JPH02129730 U JP H02129730U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- view
- holes
- test pattern
- staggered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3908589U JPH02129730U (sl) | 1989-03-30 | 1989-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3908589U JPH02129730U (sl) | 1989-03-30 | 1989-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129730U true JPH02129730U (sl) | 1990-10-25 |
Family
ID=31547673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3908589U Pending JPH02129730U (sl) | 1989-03-30 | 1989-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129730U (sl) |
-
1989
- 1989-03-30 JP JP3908589U patent/JPH02129730U/ja active Pending