JPH02129728U - - Google Patents
Info
- Publication number
- JPH02129728U JPH02129728U JP3890889U JP3890889U JPH02129728U JP H02129728 U JPH02129728 U JP H02129728U JP 3890889 U JP3890889 U JP 3890889U JP 3890889 U JP3890889 U JP 3890889U JP H02129728 U JPH02129728 U JP H02129728U
- Authority
- JP
- Japan
- Prior art keywords
- polishing machine
- polishing
- speed
- automatic
- automatic polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 9
- 239000003082 abrasive agent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3890889U JPH02129728U (hu) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3890889U JPH02129728U (hu) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129728U true JPH02129728U (hu) | 1990-10-25 |
Family
ID=31547336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3890889U Pending JPH02129728U (hu) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129728U (hu) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03261843A (ja) * | 1990-03-12 | 1991-11-21 | Shimadzu Corp | 分析試料研磨方法 |
| JPH04348028A (ja) * | 1991-05-24 | 1992-12-03 | Kyushu Electron Metal Co Ltd | 半導体試料の斜研磨法 |
| JPH05160088A (ja) * | 1991-12-05 | 1993-06-25 | Fujitsu Ltd | 半導体基板の製造方法およびそれに用いる製造装置 |
-
1989
- 1989-03-31 JP JP3890889U patent/JPH02129728U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03261843A (ja) * | 1990-03-12 | 1991-11-21 | Shimadzu Corp | 分析試料研磨方法 |
| JPH04348028A (ja) * | 1991-05-24 | 1992-12-03 | Kyushu Electron Metal Co Ltd | 半導体試料の斜研磨法 |
| JPH05160088A (ja) * | 1991-12-05 | 1993-06-25 | Fujitsu Ltd | 半導体基板の製造方法およびそれに用いる製造装置 |