JPH02129727U - - Google Patents
Info
- Publication number
- JPH02129727U JPH02129727U JP3640389U JP3640389U JPH02129727U JP H02129727 U JPH02129727 U JP H02129727U JP 3640389 U JP3640389 U JP 3640389U JP 3640389 U JP3640389 U JP 3640389U JP H02129727 U JPH02129727 U JP H02129727U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stage
- metal material
- pressure
- deformed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007769 metal material Substances 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3640389U JPH02129727U (nl) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3640389U JPH02129727U (nl) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129727U true JPH02129727U (nl) | 1990-10-25 |
Family
ID=31542601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3640389U Pending JPH02129727U (nl) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129727U (nl) |
-
1989
- 1989-03-31 JP JP3640389U patent/JPH02129727U/ja active Pending
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