JPH02129726U - - Google Patents
Info
- Publication number
- JPH02129726U JPH02129726U JP3791489U JP3791489U JPH02129726U JP H02129726 U JPH02129726 U JP H02129726U JP 3791489 U JP3791489 U JP 3791489U JP 3791489 U JP3791489 U JP 3791489U JP H02129726 U JPH02129726 U JP H02129726U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- grooves
- devices
- gaps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3791489U JPH02129726U (OSRAM) | 1989-03-30 | 1989-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3791489U JPH02129726U (OSRAM) | 1989-03-30 | 1989-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129726U true JPH02129726U (OSRAM) | 1990-10-25 |
Family
ID=31545450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3791489U Pending JPH02129726U (OSRAM) | 1989-03-30 | 1989-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129726U (OSRAM) |
-
1989
- 1989-03-30 JP JP3791489U patent/JPH02129726U/ja active Pending