JPH02129346U - - Google Patents
Info
- Publication number
- JPH02129346U JPH02129346U JP3768689U JP3768689U JPH02129346U JP H02129346 U JPH02129346 U JP H02129346U JP 3768689 U JP3768689 U JP 3768689U JP 3768689 U JP3768689 U JP 3768689U JP H02129346 U JPH02129346 U JP H02129346U
- Authority
- JP
- Japan
- Prior art keywords
- conveyance
- belt
- semiconductor wafer
- portions
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3768689U JPH02129346U (es) | 1989-03-30 | 1989-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3768689U JPH02129346U (es) | 1989-03-30 | 1989-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02129346U true JPH02129346U (es) | 1990-10-25 |
Family
ID=31545025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3768689U Pending JPH02129346U (es) | 1989-03-30 | 1989-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02129346U (es) |
-
1989
- 1989-03-30 JP JP3768689U patent/JPH02129346U/ja active Pending