JPH02127407U - - Google Patents
Info
- Publication number
- JPH02127407U JPH02127407U JP3890189U JP3890189U JPH02127407U JP H02127407 U JPH02127407 U JP H02127407U JP 3890189 U JP3890189 U JP 3890189U JP 3890189 U JP3890189 U JP 3890189U JP H02127407 U JPH02127407 U JP H02127407U
- Authority
- JP
- Japan
- Prior art keywords
- processing head
- arm
- mound
- turntable
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3890189U JPH02127407U (ro) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3890189U JPH02127407U (ro) | 1989-03-31 | 1989-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02127407U true JPH02127407U (ro) | 1990-10-19 |
Family
ID=31547322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3890189U Pending JPH02127407U (ro) | 1989-03-31 | 1989-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02127407U (ro) |
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1989
- 1989-03-31 JP JP3890189U patent/JPH02127407U/ja active Pending