JPH0212732A - Image tube - Google Patents
Image tubeInfo
- Publication number
- JPH0212732A JPH0212732A JP63163119A JP16311988A JPH0212732A JP H0212732 A JPH0212732 A JP H0212732A JP 63163119 A JP63163119 A JP 63163119A JP 16311988 A JP16311988 A JP 16311988A JP H0212732 A JPH0212732 A JP H0212732A
- Authority
- JP
- Japan
- Prior art keywords
- getter
- image tube
- photocathode
- main body
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はイメージ管の構造に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to the structure of an image tube.
従来の光電面移動型製造方法を用いるイメージ管の構造
を第4図に示す。図において、光電面2を形成された光
電面面板3はインジウム(In)4等の金属を介して管
球本体101と真空チェンバー内で溶着される。5は光
電面電極、6はMCP電極、7はアーク溶接用電極、8
は蛍光面電極、9はフリットガラス、10はセラミック
、11は蛍光面面板。FIG. 4 shows the structure of an image tube using the conventional photocathode moving type manufacturing method. In the figure, a photocathode face plate 3 having a photocathode 2 formed thereon is welded to a tube body 101 in a vacuum chamber via a metal such as indium (In) 4. 5 is a photocathode electrode, 6 is an MCP electrode, 7 is an electrode for arc welding, 8
9 is a phosphor screen electrode, 9 is a frit glass, 10 is a ceramic, and 11 is a phosphor screen plate.
12は蛍光面、 13はマイクロ・チャンネル・プレー
ト(MCP)である、この種のイメージ管内の真空度を
長期間維持するために、かかるイメージ管内には管壁よ
り放出されるガスを吸着するゲッターが配置される。12 is a phosphor screen, and 13 is a micro channel plate (MCP).In order to maintain the degree of vacuum in this type of image tube for a long period of time, there is a getter inside the image tube that adsorbs gas released from the tube wall. is placed.
このゲッターには2種類のものがあり、通電によりゲッ
ター線22が活性化されガスを吸着する、いわゆる活性
ゲッターと、ゲッター線の通電により線材が蒸発し、ゲ
ッター作用をもつ膜を形成せしめる。いわゆる1フラツ
シユゲツター′である。There are two types of getters: a so-called active getter, in which the getter wire 22 is activated by energization and adsorbs gas, and the other is a so-called active getter, in which the getter wire 22 is energized and the wire evaporates, forming a film with getter action. This is the so-called 1-flash getter'.
いずれのゲッターを用いた場合もゲッターに通電する必
要があり電極を少なくとも1極有している。When any getter is used, it is necessary to supply electricity to the getter, and the getter has at least one electrode.
通常、ゲッター線への通電は光電面面板3の封止直前に
行われる。Normally, the getter wire is energized immediately before the photocathode face plate 3 is sealed.
上述した従来のイメージ管構造ではイメージ管封止後全
く使用しない電極23を少なくとも1極有している。管
球本体101中の電極5〜8,23と絶縁用のセラミッ
ク10とは通常ロー付で封止されているが、電極数が増
えるとロー付部分も多くなり、イメージ管動作に不可欠
な真空度維持の信頼性が低くなる。The conventional image tube structure described above has at least one electrode 23 that is not used at all after the image tube is sealed. The electrodes 5 to 8, 23 in the tube body 101 and the insulating ceramic 10 are usually sealed with brazing, but as the number of electrodes increases, the number of brazed parts also increases, and the vacuum required for image tube operation increases. The reliability of maintaining the temperature becomes low.
また、電極とセラミックの数の増加により、量産時にイ
メージ管の低コスト化が戴しくなるという欠点がある。Another disadvantage is that the increased number of electrodes and ceramics makes it difficult to reduce the cost of the image tube during mass production.
本発明の目的は前記課題を解決したイメージ管を提供す
ることにある。An object of the present invention is to provide an image tube that solves the above problems.
前記目的を達成するため、本発明は真空チェンバー内の
別の位置に光電面面板と管球本体を位置させ、光電面を
製作した後、光電面面板を管球部に移動し封止する製造
方法によるイメージ管において、封止後のイメージ管内
の真空度を維持するゲッター線と、イメージ管内壁に形
成されたガス吸着用ゲッター膜とを有するものである。In order to achieve the above object, the present invention provides a manufacturing method in which the photocathode face plate and the bulb body are located at different positions in a vacuum chamber, the photocathode is manufactured, and then the photocathode face plate is moved to the bulb part and sealed. The image tube according to the method includes a getter wire for maintaining the degree of vacuum inside the image tube after sealing, and a getter film for gas adsorption formed on the inner wall of the image tube.
〔実施例〕 次に、本発明について図面を参照して説明する。〔Example〕 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の一実施例の縦断面図である。FIG. 1 is a longitudinal sectional view of one embodiment of the present invention.
管球本体100には、ゲッター線とその通電用電極を持
たずに、後述する方法によって形成されるゲッター膜1
を有している。The bulb body 100 has a getter film 1 formed by a method described later without having a getter wire and its current-carrying electrode.
have.
ゲッター膜が絶縁用セラミックを介して、2つの電極に
またがる形状で蒸着されると、その2つの電極間の絶縁
が劣化するので、第1図ではMCP(マイクロ・チャン
ネル・プレート)電極6のうちの一方にゲッター膜1を
形成した例を示したが、本発明はこの位置に限定される
ものではない。If the getter film is deposited across two electrodes via an insulating ceramic, the insulation between the two electrodes will deteriorate, so in FIG. Although an example has been shown in which the getter film 1 is formed on one side, the present invention is not limited to this position.
第2図は本発明のイメージ管を製造するための真空チェ
ンバーの一例を示す縦断面図である。FIG. 2 is a longitudinal sectional view showing an example of a vacuum chamber for manufacturing the image tube of the present invention.
管球本体100と光電面面板3を別の位置に設置し、真
空チェンバー内を排気する。光電面形成部16において
光電面2を形成する。ここで、先端にフラッシュゲッタ
ー19を取付けたゲッター移動用マニプユレータ18を
下げ管球本体100の所定の位置にてフラッシュゲッタ
ー19を蒸発させ、ゲッター膜1を形成する。その後、
ゲッター移動用マニプユレータ18を上げ、光電面面板
3を移動し、管球本体100を封止する。The tube body 100 and the photocathode face plate 3 are installed at different positions, and the inside of the vacuum chamber is evacuated. The photocathode 2 is formed in the photocathode forming section 16 . Here, the getter moving manipulator 18 with the flash getter 19 attached to its tip is lowered to evaporate the flash getter 19 at a predetermined position on the bulb body 100, thereby forming the getter film 1. after that,
The getter moving manipulator 18 is raised, the photocathode face plate 3 is moved, and the tube body 100 is sealed.
第3図はMCP電極6と、ゲッター膜1形成時のゲッタ
ー移動用マニプユレータ18との関係の一例を示したも
のである。フラッシュゲッター19から蒸発し形成され
るゲッター膜1の位置を限定するためにフラッシュゲッ
ター19の周囲にカバー21を有している。FIG. 3 shows an example of the relationship between the MCP electrode 6 and the getter moving manipulator 18 when the getter film 1 is formed. A cover 21 is provided around the flash getter 19 to limit the position of the getter film 1 formed by evaporation from the flash getter 19.
以上説明したように本発明はゲッター膜を形成したので
、構造上ゲッター線とその通電用電極を必要としないイ
メージ管を供給でき、したがって。As explained above, since the getter film is formed in the present invention, it is possible to provide an image tube that structurally does not require a getter wire and its current-carrying electrode.
ロー付箇所の減少により真空度維持に関する信頼性の向
上と、部品数の削減による低コスト化を実現できる効果
がある。The reduction in the number of brazed parts has the effect of improving reliability in maintaining the vacuum level, and lowering costs by reducing the number of parts.
第1図は本発明のイメージ管の縦断面図、第2図は本発
明のイメージ管を製造するための真空チェンバーの縦断
面図、第3図はMCP電極とフラッシュゲッターの位置
関係を示す図、第4図は従来のイメージ管の縦断面図で
ある。
1・・・ゲッター膜 2・・・光電面3・・・
光電面面板 4・・・インジウム5・・・光電
面電極 6・・・MCP電極7・・・アーク溶
接用電極 8・・・蛍光面電極9・・・フリットガラ
ス 10・・・セラミック11・・・蛍光面面板
12・・・蛍光面13・・・マイクロ・チャン
ネル・プレート(MCP)14・・・真空チェンバー
15・・・光電面面板移動用マニプユレータ16・・・
光電面形成部 17・・・光電面蒸着物質18・
・・ゲッター移動用マニプユレータ19・・・フラッシ
ュゲッター
20.23・・・ゲッター通電用電極FIG. 1 is a vertical cross-sectional view of the image tube of the present invention, FIG. 2 is a vertical cross-sectional view of a vacuum chamber for manufacturing the image tube of the present invention, and FIG. 3 is a diagram showing the positional relationship between the MCP electrode and the flash getter. , FIG. 4 is a longitudinal sectional view of a conventional image tube. 1... Getter film 2... Photocathode 3...
Photocathode face plate 4... Indium 5... Photocathode electrode 6... MCP electrode 7... Arc welding electrode 8... Fluorescent screen electrode 9... Frit glass 10... Ceramic 11...・Phosphor screen plate
12... Fluorescent screen 13... Micro channel plate (MCP) 14... Vacuum chamber 15... Manipulator for moving the photocathode surface plate 16...
Photocathode forming part 17...Photocathode deposition material 18.
...Getter movement manipulator 19...Flash getter 20.23...Getter energization electrode
Claims (1)
本体を位置させ、光電面を製作した後、光電面面板を管
球部に移動し封止する製造方法によるイメージ管におい
て、封止後のイメージ管内の真空度を維持するゲッター
線と、イメージ管内壁に形成されたガス吸着用ゲッター
膜とを有することを特徴とするイメージ管。(1) In an image tube manufactured by a manufacturing method in which the photocathode face plate and the tube body are placed in different positions in a vacuum chamber, the photocathode is fabricated, and then the photocathode face plate is moved to the tube part and sealed. What is claimed is: 1. An image tube comprising: a getter wire for maintaining the degree of vacuum within the image tube after the image tube is stopped; and a getter film for gas adsorption formed on the inner wall of the image tube.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63163119A JPH0212732A (en) | 1988-06-30 | 1988-06-30 | Image tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63163119A JPH0212732A (en) | 1988-06-30 | 1988-06-30 | Image tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0212732A true JPH0212732A (en) | 1990-01-17 |
Family
ID=15767538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63163119A Pending JPH0212732A (en) | 1988-06-30 | 1988-06-30 | Image tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0212732A (en) |
-
1988
- 1988-06-30 JP JP63163119A patent/JPH0212732A/en active Pending
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