JPH02127026U - - Google Patents
Info
- Publication number
- JPH02127026U JPH02127026U JP3574889U JP3574889U JPH02127026U JP H02127026 U JPH02127026 U JP H02127026U JP 3574889 U JP3574889 U JP 3574889U JP 3574889 U JP3574889 U JP 3574889U JP H02127026 U JPH02127026 U JP H02127026U
- Authority
- JP
- Japan
- Prior art keywords
- ridge line
- lid
- lid portion
- grooves
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図は本考案の実施例の閉蓋時の断面を示す
側面図、第２図は同開蓋時の断面を示す側面図、
第３図は蓋部の下面図、第４図は第１図における
−線断面図、第５図は従来例の内部断面を示
す側面図である。
図中、１は蓋部、２は容器、３は蓋内面中心部
、４は稜線、５は外周部の差、６は蓋の開閉軸、
７は噴出口、８は半導体ウエハ、９はキヤリヤ、
１０は排気管、１１は水滴である。
FIG. 1 is a side view showing a cross section of an embodiment of the present invention when the lid is closed, and FIG. 2 is a side view showing a cross section when the lid is open.
3 is a bottom view of the lid, FIG. 4 is a cross-sectional view taken along the line -- in FIG. 1, and FIG. 5 is a side view showing an internal cross-section of the conventional example. In the figure, 1 is the lid, 2 is the container, 3 is the center of the inner surface of the lid, 4 is the ridgeline, 5 is the difference in the outer periphery, 6 is the opening/closing axis of the lid,
7 is a spout, 8 is a semiconductor wafer, 9 is a carrier,
10 is an exhaust pipe, and 11 is a water droplet.
Claims (1)
状に稜線を形成し、前記の蓋部の内面外周部に、
水滴が集合する溝を設けたホトレジスト現像装置
。 A ridge line is formed radially outward from the protruding center portion on the inner surface of the lid portion, and a ridge line is formed on the inner surface outer peripheral portion of the lid portion,
A photoresist developing device with grooves where water droplets collect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3574889U JPH02127026U (en) | 1989-03-28 | 1989-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3574889U JPH02127026U (en) | 1989-03-28 | 1989-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02127026U true JPH02127026U (en) | 1990-10-19 |
Family
ID=31541372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3574889U Pending JPH02127026U (en) | 1989-03-28 | 1989-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02127026U (en) |
-
1989
- 1989-03-28 JP JP3574889U patent/JPH02127026U/ja active Pending
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