JPH02126689A - Discharge electrode apparatus for nitrogen laser - Google Patents
Discharge electrode apparatus for nitrogen laserInfo
- Publication number
- JPH02126689A JPH02126689A JP27997588A JP27997588A JPH02126689A JP H02126689 A JPH02126689 A JP H02126689A JP 27997588 A JP27997588 A JP 27997588A JP 27997588 A JP27997588 A JP 27997588A JP H02126689 A JPH02126689 A JP H02126689A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- electrode
- discharge
- preliminary ionization
- discharge electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 15
- 239000003990 capacitor Substances 0.000 claims abstract description 19
- 238000004544 sputter deposition Methods 0.000 claims abstract description 12
- 239000004020 conductor Substances 0.000 claims abstract description 8
- 230000015556 catabolic process Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、窒素レーザ用放電電極装置に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a discharge electrode device for a nitrogen laser.
窒素レーザは、窒素ガス雰囲気中で放電を行うことによ
り得られるレーザであるが、この放電を行うため、従来
より放電電極とコンデンサとを一体的に形成した放電電
極装置が用いられている。A nitrogen laser is a laser obtained by performing discharge in a nitrogen gas atmosphere, and in order to perform this discharge, a discharge electrode device in which a discharge electrode and a capacitor are integrally formed has conventionally been used.
第４閲および第５図は従来の放電電極装置の構造および
等価回路の一例を示し、これらの図において、Ｃ１，Ｃ
２は一方の電極を互いに共用するように互いに並列接続
されたコンデンサで、例えば誘電体としてのセラミンク
１の下面に銀または銅などの薄い金属板を蒸着あるいは
接着などの手段で止着して、共用側の一方の電極として
の下部電極２を形成する一方、セラミック１の上面に銀
または銅などの薄い金属板を凍着あるいは接着などの手
段で止着して、前記下部電極２に対向する他方の電極と
しての上部電極３．４を形成し、コンデンサＣ１を上部
電極３と下部電極２とにより、また、コンデンサＣ２を
上部電極４と下部電極２とによりそれぞれ構成しである
。Figures 4 and 5 show an example of the structure and equivalent circuit of a conventional discharge electrode device, and in these figures, C1, C
2 are capacitors connected in parallel so that one electrode is shared with each other; for example, a thin metal plate of silver or copper is fixed to the lower surface of the ceramic layer 1 as a dielectric by means of vapor deposition or adhesion; While forming a lower electrode 2 as one electrode on the common side, a thin metal plate made of silver or copper is fixed to the upper surface of the ceramic 1 by freezing or gluing, and is opposed to the lower electrode 2. An upper electrode 3.4 is formed as the other electrode, and the capacitor C1 is composed of the upper electrode 3 and the lower electrode 2, and the capacitor C2 is composed of the upper electrode 4 and the lower electrode 2.
５．６は上部電極３．４の上面にハンダ付けなどの手段
によりそれぞれ設けられる例えばアルミニウムよりなる
台座で、これら台座５，６の上部に放電電極７．８が所
定の間隔をおいてそれぞれ取り付けである。これら放電
電極７．８は例えば真鍮よりなり、その間隔を調整でき
るようにねし止めされている。Reference numerals 5.6 denote pedestals made of aluminum, for example, which are provided on the upper surfaces of the upper electrodes 3.4 by means of soldering or the like, and discharge electrodes 7.8 are attached at predetermined intervals to the upper parts of these pedestals 5 and 6, respectively. It is. These discharge electrodes 7.8 are made of brass, for example, and are screwed together so that their spacing can be adjusted.
なお、第５図において、ＳはコンデンサＣ６の上部電極
３と下部電極２との間を短絡するように設けられる常開
スイッチである。In addition, in FIG. 5, S is a normally open switch provided to short-circuit between the upper electrode 3 and lower electrode 2 of the capacitor C6.
而して、上記構成の放電電極装置において所定の放電を
発生させるには、まず、図外の１！源によりコンデンサ
Ｃ，，Ｃ，を所定の電圧に充電する。In order to generate a predetermined discharge in the discharge electrode device having the above configuration, first, step 1 (not shown) is necessary. The capacitors C,,C, are charged to a predetermined voltage by the source.
次いで、スイッチＳを瞬時に閉じると、コンデンサＣＩ
の極性が逆転し、これによって放電電極７゜８間に高電
圧が印加されるため、両電橋７．８間において主放電が
生ずるのである。Then, when switch S is momentarily closed, capacitor CI
The polarity of the two electric bridges 7.8 is reversed, and a high voltage is applied between the discharge electrodes 7.8, so that a main discharge occurs between the two electric bridges 7.8.
そして、この主放電が円滑に行われるようにするため、
主放電の直前に予（＃Ｗ離が行われるが、上記従来の放
電電極装置においては、下部電極３４間で予備電離が行
われるようにしていた。なお第５父において、Ｅは予備
電離電極を示す。In order to ensure that this main discharge occurs smoothly,
Preliminary (#W separation) is performed immediately before the main discharge, but in the conventional discharge electrode device described above, preliminary ionization is performed between the lower electrodes 34. shows.
しかしながら、上述の説明から理解されるように、従来
の放電電極装置においては、２つのコンデンサＣ＋、Ｃ
Ｚのそれぞれの上部電極３，４を予（３１１ｆ Ｍのた
めの電極に兼用しているため、この子ｍ電離を繰り返し
行うと、薄い金属板からなる上部電極３．４がスパッタ
リングによって削られてコンデンサ容量が低下し、これ
によって放電が不安定になり、窒素レーザの安定な発振
が阻害されてしまうことがある。また、下部電極３．４
が削られると、誘電体１中の電解強度が強くなり、その
結果、コンデンサＣ，，Ｃ２が絶縁破壊されてしまうお
それがある。However, as understood from the above explanation, in the conventional discharge electrode device, two capacitors C+ and C
Since each of the upper electrodes 3 and 4 of Z is also used as an electrode for the pre-(311f) M, when this secondary m ionization is repeated, the upper electrodes 3 and 4 made of a thin metal plate are scraped off by sputtering. The capacitance of the capacitor decreases, which may make the discharge unstable and inhibit stable oscillation of the nitrogen laser.In addition, the lower electrode 3.4
If the capacitors C and C2 are scraped, the electrolytic strength in the dielectric 1 becomes stronger, and as a result, there is a risk that the capacitors C, C2 will be dielectrically broken down.
本発明は、上述の事柄に留意してなされたもので、その
目的とするところは、予備電離を繰り返し行っても上部
電極が削られたりすることがない、長寿命で安定な性能
を有する窒素レーザ用敢電電極装置を提供することにあ
る。The present invention has been made with the above-mentioned considerations in mind, and its purpose is to provide nitrogen with a long life and stable performance that will not scratch the upper electrode even if pre-ionization is repeated. An object of the present invention is to provide a laser electrode device.
上述の目的を達成するため、本発明に係る窒素レーザ用
放電電極装置は、一方の電極を互いに共用した２つのコ
ンデンサの前記一方の電極にそれぞれ対応する２つの他
方の電極に、これらｔｉの少なくとも互いに近接する側
をそれぞれ覆うようにして・耐スパッタリング性の良好
な導電材料よりなる予備電離電極を設けた点に特徴があ
る。In order to achieve the above object, the nitrogen laser discharge electrode device according to the present invention includes at least one of these ti on two other electrodes corresponding to the one electrode of two capacitors sharing one electrode with each other. It is characterized in that pre-ionization electrodes made of a conductive material with good sputtering resistance are provided so as to cover the sides adjacent to each other.
上記構成によれば、主放電に先行する予備電離は、耐ス
パッタリング性の良好な導電材料よりなる予備量Ｍ電極
間で行われるので、従来装置とは異なり、予ｍ電離を繰
り返し行っても上部電極がスパッタリングによって削ら
れることがなくなり、上記目的は完全に達成される。According to the above configuration, the preliminary ionization that precedes the main discharge is performed between the preliminary M electrodes made of a conductive material with good sputtering resistance. The electrode is no longer scraped by sputtering, and the above objective is completely achieved.
以下、本発明の実施例を、図面を参照しながら説明する
。Embodiments of the present invention will be described below with reference to the drawings.
第１図および第２図は本発明の一実施例に係る放電電極
装置を示す。この実施例の放電電極装置が上記従来の放
［電極装置と大きく異なる点は、台座５．６と放電電極
７，８との間に、予備電離電極９．１０をそれぞれ設け
たことである。1 and 2 show a discharge electrode device according to an embodiment of the present invention. The discharge electrode device of this embodiment differs greatly from the conventional discharge electrode device described above in that preliminary ionization electrodes 9.10 are provided between the pedestal 5.6 and the discharge electrodes 7 and 8, respectively.
すなわち、これらの予備電離量＄１ｊｉ９．１０は例え
ば真鍮などのように耐スパッタリング性の良好な導電材
料よりなり、上部電極３．４の少なくとも互いに近接す
る側をそれぞれ覆うようにして、例えばハンダ付けなど
の手段により、上部電極３４および上部電極３．４に止
着されている。That is, these preliminary ionization amounts $1ji9.10 are made of a conductive material with good sputtering resistance, such as brass, and are made to cover at least the mutually adjacent sides of the upper electrodes 3.4, for example, by soldering. It is fixedly attached to the upper electrode 34 and the upper electrode 3.4 by means such as the above.
而して、このように構成された放電電極装置においては
、主放電に先行する予備電離は、耐スパッタリング性の
良好な導電材料よりなる予備電離型Ｊｉ９，１０間で行
われるので、従来装置とは異なり、予備電離を繰り返し
行っても上部電極３．４がスパッタリングによって削ら
れることがなくなる。従って、上部電極３．４の消耗に
起因してコンデンサの容量が低下するといったことがな
くなるので、窒素レーザを長期にわたって安定に発振さ
せることができる。また、上部電極３．４の消耗に起因
して誘電体１中の電解強度が強くなるといったこともな
くなるので、コンデンサＣ，，ｃ。In the discharge electrode device configured as described above, the pre-ionization prior to the main discharge is performed between the pre-ionization type Ji9 and Ji10 made of a conductive material with good sputtering resistance, so that it is different from the conventional device. In contrast, even if preliminary ionization is repeated, the upper electrode 3.4 will not be scraped off by sputtering. Therefore, since the capacitance of the capacitor does not decrease due to wear of the upper electrode 3.4, the nitrogen laser can be stably oscillated over a long period of time. Further, since the electrolytic strength in the dielectric 1 does not become stronger due to wear of the upper electrode 3.4, the capacitors C,,c.
が絶縁破壊されることもなくなる。There will be no dielectric breakdown.
さらに、上述の実施例によれば、放電電極７８と予備電
離電極９．１０とは別体であるから、放電電極７．８間
の距離を調整可能なように構成することができる。Furthermore, according to the embodiment described above, since the discharge electrode 78 and the pre-ionization electrode 9.10 are separate bodies, the distance between the discharge electrodes 7.8 can be adjusted.
第３図は本発明の他の実施例に係る放電電極装置を示し
、この実施例においては、上記放電電極７．８と予備電
離電極９．１０とを一体化した電極１１、１２によって
上部電極３．４を覆うようにしている。この場合、一体
化電極１１．１２が耐スパッタリング性の良好な導電材
料よりなることは云うまでもない。この実施例によれば
、放電電極装置をよりシンプルな構造に構成することが
できる。FIG. 3 shows a discharge electrode device according to another embodiment of the present invention. In this embodiment, the upper electrode is I am trying to cover 3.4. In this case, it goes without saying that the integrated electrodes 11, 12 are made of a conductive material with good sputtering resistance. According to this embodiment, the discharge electrode device can be configured to have a simpler structure.
上述の各実施例においては、コンデンサＣＣ２はいわゆ
るセラミックコンデンサに構成してあったが、誘電体１
としてセラミックに代えて、例えばプリント基板を用い
、いわゆる平板コンデンサに構成してあっても良い。In each of the embodiments described above, the capacitor CC2 was configured as a so-called ceramic capacitor, but the dielectric 1
For example, instead of ceramic, a printed circuit board may be used to form a so-called flat plate capacitor.
以上説明したように、本発明によれば、予備電離を繰り
返し行っても上部電極が削られたりすることがないので
、長寿命で安定な性能を有する窒素レーザ用放電電極装
置を得ることができる６As explained above, according to the present invention, the upper electrode is not scraped even if preliminary ionization is repeated, so it is possible to obtain a discharge electrode device for a nitrogen laser that has a long life and stable performance. 6
第１図および第２図は本発明の一実施例に係る窒素レー
ザ用放電電極装置を示し、第１図は全体構成を示す斜視
図、第２図は縦断面図である。
第３図は本発明の他の実施例に係る窒素レーザ用放電電
極装置の縦断面図である。
第４図は従来の窒素レーザ用放電電極装置の縦断面図で
ある。
第５図は窒素レーザ用放電電極装置の等価回路を示す図
である。
２・・・一方の電極、３，４・・・他方の電極、７．８
・・・放電電極、９．１０・・・予（ｌｉｉ電離電極、
１１．１２・・・−体化電極、Ｃ，、Ｃ，・・・コンデ
ンサ。1 and 2 show a discharge electrode device for a nitrogen laser according to an embodiment of the present invention, FIG. 1 being a perspective view showing the overall configuration, and FIG. 2 being a longitudinal sectional view. FIG. 3 is a longitudinal sectional view of a discharge electrode device for a nitrogen laser according to another embodiment of the present invention. FIG. 4 is a longitudinal sectional view of a conventional discharge electrode device for a nitrogen laser. FIG. 5 is a diagram showing an equivalent circuit of a discharge electrode device for a nitrogen laser. 2... One electrode, 3, 4... Other electrode, 7.8
...Discharge electrode, 9.10...Preliminary (lii ionization electrode,
11.12...-Embedded electrode, C,, C,... Capacitor.
Claims (1)
一方の電極にそれぞれ対応する２つの他方の電極にそれ
ぞれ放電電極を設けた窒素レーザ用放電電極装置におい
て、前記他方の電極少なくとも互いに近接する側をそれ
ぞれ覆うようにして、耐スパッタリング性の良好な導電
材料よりなる予備電離電極を設けたことを特徴とする窒
素レーザ用放電電極装置。In a discharge electrode device for a nitrogen laser, in which a discharge electrode is provided on each of two other electrodes corresponding to the one electrode of two capacitors that share one electrode, at least the sides adjacent to each other of the other electrodes are respectively provided. A discharge electrode device for a nitrogen laser, characterized in that a preliminary ionization electrode made of a conductive material with good sputtering resistance is provided so as to cover the electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27997588A JPH0716044B2 (en) | 1988-11-05 | 1988-11-05 | Discharge electrode device for nitrogen laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27997588A JPH0716044B2 (en) | 1988-11-05 | 1988-11-05 | Discharge electrode device for nitrogen laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02126689A true JPH02126689A (en) | 1990-05-15 |
| JPH0716044B2 JPH0716044B2 (en) | 1995-02-22 |
Family
ID=17618553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27997588A Expired - Lifetime JPH0716044B2 (en) | 1988-11-05 | 1988-11-05 | Discharge electrode device for nitrogen laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716044B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03104770U (en) * | 1990-02-15 | 1991-10-30 |
-
1988
- 1988-11-05 JP JP27997588A patent/JPH0716044B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03104770U (en) * | 1990-02-15 | 1991-10-30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0716044B2 (en) | 1995-02-22 |
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