JPH02126357U - - Google Patents
Info
- Publication number
- JPH02126357U JPH02126357U JP3472689U JP3472689U JPH02126357U JP H02126357 U JPH02126357 U JP H02126357U JP 3472689 U JP3472689 U JP 3472689U JP 3472689 U JP3472689 U JP 3472689U JP H02126357 U JPH02126357 U JP H02126357U
- Authority
- JP
- Japan
- Prior art keywords
- aperture
- objective
- drive mechanism
- detector
- mechanism control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3472689U JPH02126357U (enExample) | 1989-03-29 | 1989-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3472689U JPH02126357U (enExample) | 1989-03-29 | 1989-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02126357U true JPH02126357U (enExample) | 1990-10-18 |
Family
ID=31539452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3472689U Pending JPH02126357U (enExample) | 1989-03-29 | 1989-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02126357U (enExample) |
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1989
- 1989-03-29 JP JP3472689U patent/JPH02126357U/ja active Pending