JPH02125733U - - Google Patents

Info

Publication number
JPH02125733U
JPH02125733U JP3591389U JP3591389U JPH02125733U JP H02125733 U JPH02125733 U JP H02125733U JP 3591389 U JP3591389 U JP 3591389U JP 3591389 U JP3591389 U JP 3591389U JP H02125733 U JPH02125733 U JP H02125733U
Authority
JP
Japan
Prior art keywords
path
vacuum chamber
vacuum container
vacuum
air passes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3591389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3591389U priority Critical patent/JPH02125733U/ja
Publication of JPH02125733U publication Critical patent/JPH02125733U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
JP3591389U 1989-03-29 1989-03-29 Pending JPH02125733U (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3591389U JPH02125733U (el) 1989-03-29 1989-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3591389U JPH02125733U (el) 1989-03-29 1989-03-29

Publications (1)

Publication Number Publication Date
JPH02125733U true JPH02125733U (el) 1990-10-17

Family

ID=31541680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3591389U Pending JPH02125733U (el) 1989-03-29 1989-03-29

Country Status (1)

Country Link
JP (1) JPH02125733U (el)

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