JPH02125341U - - Google Patents

Info

Publication number
JPH02125341U
JPH02125341U JP3347689U JP3347689U JPH02125341U JP H02125341 U JPH02125341 U JP H02125341U JP 3347689 U JP3347689 U JP 3347689U JP 3347689 U JP3347689 U JP 3347689U JP H02125341 U JPH02125341 U JP H02125341U
Authority
JP
Japan
Prior art keywords
table mechanism
carrier
support body
wafer
wafer support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3347689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3347689U priority Critical patent/JPH02125341U/ja
Publication of JPH02125341U publication Critical patent/JPH02125341U/ja
Pending legal-status Critical Current

Links

JP3347689U 1989-03-23 1989-03-23 Pending JPH02125341U (US07655688-20100202-C00548.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3347689U JPH02125341U (US07655688-20100202-C00548.png) 1989-03-23 1989-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3347689U JPH02125341U (US07655688-20100202-C00548.png) 1989-03-23 1989-03-23

Publications (1)

Publication Number Publication Date
JPH02125341U true JPH02125341U (US07655688-20100202-C00548.png) 1990-10-16

Family

ID=31537168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3347689U Pending JPH02125341U (US07655688-20100202-C00548.png) 1989-03-23 1989-03-23

Country Status (1)

Country Link
JP (1) JPH02125341U (US07655688-20100202-C00548.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355541B2 (US07655688-20100202-C00548.png) * 1982-11-12 1988-11-02 Sumitomo Naugatuck

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6355541B2 (US07655688-20100202-C00548.png) * 1982-11-12 1988-11-02 Sumitomo Naugatuck

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