JPH02125333U - - Google Patents
Info
- Publication number
- JPH02125333U JPH02125333U JP3381789U JP3381789U JPH02125333U JP H02125333 U JPH02125333 U JP H02125333U JP 3381789 U JP3381789 U JP 3381789U JP 3381789 U JP3381789 U JP 3381789U JP H02125333 U JPH02125333 U JP H02125333U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- chemical
- spray nozzle
- spouting
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381789U JPH02125333U (pl) | 1989-03-24 | 1989-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381789U JPH02125333U (pl) | 1989-03-24 | 1989-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125333U true JPH02125333U (pl) | 1990-10-16 |
Family
ID=31537767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3381789U Pending JPH02125333U (pl) | 1989-03-24 | 1989-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125333U (pl) |
-
1989
- 1989-03-24 JP JP3381789U patent/JPH02125333U/ja active Pending