JPH02125327U - - Google Patents

Info

Publication number
JPH02125327U
JPH02125327U JP3381089U JP3381089U JPH02125327U JP H02125327 U JPH02125327 U JP H02125327U JP 3381089 U JP3381089 U JP 3381089U JP 3381089 U JP3381089 U JP 3381089U JP H02125327 U JPH02125327 U JP H02125327U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
wafer
nozzles
entire surface
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3381089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3381089U priority Critical patent/JPH02125327U/ja
Publication of JPH02125327U publication Critical patent/JPH02125327U/ja
Pending legal-status Critical Current

Links

JP3381089U 1989-03-24 1989-03-24 Pending JPH02125327U (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3381089U JPH02125327U (xx) 1989-03-24 1989-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3381089U JPH02125327U (xx) 1989-03-24 1989-03-24

Publications (1)

Publication Number Publication Date
JPH02125327U true JPH02125327U (xx) 1990-10-16

Family

ID=31537758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3381089U Pending JPH02125327U (xx) 1989-03-24 1989-03-24

Country Status (1)

Country Link
JP (1) JPH02125327U (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203469A (ja) * 2010-03-25 2011-10-13 Toppan Printing Co Ltd 現像方法および現像装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203469A (ja) * 2010-03-25 2011-10-13 Toppan Printing Co Ltd 現像方法および現像装置

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