JPH02125327U - - Google Patents
Info
- Publication number
- JPH02125327U JPH02125327U JP3381089U JP3381089U JPH02125327U JP H02125327 U JPH02125327 U JP H02125327U JP 3381089 U JP3381089 U JP 3381089U JP 3381089 U JP3381089 U JP 3381089U JP H02125327 U JPH02125327 U JP H02125327U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- wafer
- nozzles
- entire surface
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381089U JPH02125327U (no) | 1989-03-24 | 1989-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381089U JPH02125327U (no) | 1989-03-24 | 1989-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125327U true JPH02125327U (no) | 1990-10-16 |
Family
ID=31537758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3381089U Pending JPH02125327U (no) | 1989-03-24 | 1989-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125327U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011203469A (ja) * | 2010-03-25 | 2011-10-13 | Toppan Printing Co Ltd | 現像方法および現像装置 |
-
1989
- 1989-03-24 JP JP3381089U patent/JPH02125327U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011203469A (ja) * | 2010-03-25 | 2011-10-13 | Toppan Printing Co Ltd | 現像方法および現像装置 |