JPH02125326U - - Google Patents

Info

Publication number
JPH02125326U
JPH02125326U JP3351389U JP3351389U JPH02125326U JP H02125326 U JPH02125326 U JP H02125326U JP 3351389 U JP3351389 U JP 3351389U JP 3351389 U JP3351389 U JP 3351389U JP H02125326 U JPH02125326 U JP H02125326U
Authority
JP
Japan
Prior art keywords
wafer
resist
suctioned
chuck
wafer chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3351389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3351389U priority Critical patent/JPH02125326U/ja
Publication of JPH02125326U publication Critical patent/JPH02125326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3351389U 1989-03-23 1989-03-23 Pending JPH02125326U (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3351389U JPH02125326U (US07223432-20070529-C00017.png) 1989-03-23 1989-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3351389U JPH02125326U (US07223432-20070529-C00017.png) 1989-03-23 1989-03-23

Publications (1)

Publication Number Publication Date
JPH02125326U true JPH02125326U (US07223432-20070529-C00017.png) 1990-10-16

Family

ID=31537228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3351389U Pending JPH02125326U (US07223432-20070529-C00017.png) 1989-03-23 1989-03-23

Country Status (1)

Country Link
JP (1) JPH02125326U (US07223432-20070529-C00017.png)

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