JPH02124656U - - Google Patents
Info
- Publication number
- JPH02124656U JPH02124656U JP3381889U JP3381889U JPH02124656U JP H02124656 U JPH02124656 U JP H02124656U JP 3381889 U JP3381889 U JP 3381889U JP 3381889 U JP3381889 U JP 3381889U JP H02124656 U JPH02124656 U JP H02124656U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- cryopanel
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008929 regeneration Effects 0.000 claims 1
- 238000011069 regeneration method Methods 0.000 claims 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は、本考案のヒーター付きクライオポン
プの斜視図、第２図は従来の断面図である。
１……クライオポンプ本体、２……第一クライ
オパネル、３……第二クライオパネル、４……ヒ
ーター線、５……ヒーター電源。
FIG. 1 is a perspective view of a cryopump with a heater according to the present invention, and FIG. 2 is a sectional view of a conventional cryopump. 1... Cryopump main body, 2... First cryopanel, 3... Second cryopanel, 4... Heater wire, 5... Heater power supply.
Claims (1)
ターを有するクライオポンプ。 A cryopump with a regeneration heater in the cryopanel inside the cryopump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381889U JPH02124656U (en) | 1989-03-24 | 1989-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3381889U JPH02124656U (en) | 1989-03-24 | 1989-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02124656U true JPH02124656U (en) | 1990-10-15 |
Family
ID=31537769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3381889U Pending JPH02124656U (en) | 1989-03-24 | 1989-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02124656U (en) |
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1989
- 1989-03-24 JP JP3381889U patent/JPH02124656U/ja active Pending