JPH02124498U - - Google Patents
Info
- Publication number
- JPH02124498U JPH02124498U JP3124689U JP3124689U JPH02124498U JP H02124498 U JPH02124498 U JP H02124498U JP 3124689 U JP3124689 U JP 3124689U JP 3124689 U JP3124689 U JP 3124689U JP H02124498 U JPH02124498 U JP H02124498U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heat treatment
- treatment furnace
- section
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3124689U JPH02124498U (fi) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3124689U JPH02124498U (fi) | 1989-03-17 | 1989-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02124498U true JPH02124498U (fi) | 1990-10-12 |
Family
ID=31533990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3124689U Pending JPH02124498U (fi) | 1989-03-17 | 1989-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02124498U (fi) |
-
1989
- 1989-03-17 JP JP3124689U patent/JPH02124498U/ja active Pending