JPH0212437U - - Google Patents
Info
- Publication number
- JPH0212437U JPH0212437U JP9131488U JP9131488U JPH0212437U JP H0212437 U JPH0212437 U JP H0212437U JP 9131488 U JP9131488 U JP 9131488U JP 9131488 U JP9131488 U JP 9131488U JP H0212437 U JPH0212437 U JP H0212437U
- Authority
- JP
- Japan
- Prior art keywords
- window
- vacuum container
- reflecting mirrors
- vacuum
- shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011109 contamination Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Optical Elements Other Than Lenses (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9131488U JPH0212437U (bs) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9131488U JPH0212437U (bs) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0212437U true JPH0212437U (bs) | 1990-01-25 |
Family
ID=31315798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9131488U Pending JPH0212437U (bs) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0212437U (bs) |
-
1988
- 1988-07-08 JP JP9131488U patent/JPH0212437U/ja active Pending