JPH02122597U - - Google Patents
Info
- Publication number
- JPH02122597U JPH02122597U JP2963689U JP2963689U JPH02122597U JP H02122597 U JPH02122597 U JP H02122597U JP 2963689 U JP2963689 U JP 2963689U JP 2963689 U JP2963689 U JP 2963689U JP H02122597 U JPH02122597 U JP H02122597U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic adsorption
- electrostatic
- power source
- adsorption electrode
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims description 2
- 230000004931 aggregating effect Effects 0.000 claims 1
- 238000001312 dry etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Jigs For Machine Tools (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2963689U JPH076718Y2 (ja) | 1989-03-15 | 1989-03-15 | 静電吸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2963689U JPH076718Y2 (ja) | 1989-03-15 | 1989-03-15 | 静電吸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02122597U true JPH02122597U (uk) | 1990-10-08 |
JPH076718Y2 JPH076718Y2 (ja) | 1995-02-15 |
Family
ID=31254017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2963689U Expired - Lifetime JPH076718Y2 (ja) | 1989-03-15 | 1989-03-15 | 静電吸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH076718Y2 (uk) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06267864A (ja) * | 1993-03-15 | 1994-09-22 | Toshiba Mach Co Ltd | 気相成長装置 |
JP2007150351A (ja) * | 2007-02-15 | 2007-06-14 | Toto Ltd | 静電チャック |
JP2009170509A (ja) * | 2008-01-11 | 2009-07-30 | Hitachi High-Technologies Corp | ヒータ内蔵静電チャックを備えたプラズマ処理装置 |
-
1989
- 1989-03-15 JP JP2963689U patent/JPH076718Y2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06267864A (ja) * | 1993-03-15 | 1994-09-22 | Toshiba Mach Co Ltd | 気相成長装置 |
JP2007150351A (ja) * | 2007-02-15 | 2007-06-14 | Toto Ltd | 静電チャック |
JP2009170509A (ja) * | 2008-01-11 | 2009-07-30 | Hitachi High-Technologies Corp | ヒータ内蔵静電チャックを備えたプラズマ処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH076718Y2 (ja) | 1995-02-15 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |