JPH02122432U - - Google Patents

Info

Publication number

JPH02122432U

JPH02122432U JP3228289U JP3228289U JPH02122432U JP H02122432 U JPH02122432 U JP H02122432U JP 3228289 U JP3228289 U JP 3228289U JP 3228289 U JP3228289 U JP 3228289U JP H02122432 U JPH02122432 U JP H02122432U

Authority

JP

Japan

Prior art keywords

reaction tube

wafer

boat

holds

semiconductor wafer

Prior art date

1989-03-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000006243 chemical reaction Methods 0.000 claims description 4
• 230000001590 oxidative effect Effects 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 5
• 230000003647 oxidation Effects 0.000 claims 2
• 238000007254 oxidation reaction Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1