JPH02122429U - - Google Patents
Info
- Publication number
- JPH02122429U JPH02122429U JP3238489U JP3238489U JPH02122429U JP H02122429 U JPH02122429 U JP H02122429U JP 3238489 U JP3238489 U JP 3238489U JP 3238489 U JP3238489 U JP 3238489U JP H02122429 U JPH02122429 U JP H02122429U
- Authority
- JP
- Japan
- Prior art keywords
- roller
- adhesive tape
- lift
- lifted
- presser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002390 adhesive tape Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Description
第１図は本考案の一実施例に係るリフトオフ装
置の斜視図、第２図イからロは何れも本考案のリ
フトオフ装置の使用例を説明する側面図である。
第３図イからニは何れもリフトオフを説明する要
部断面図、第４図イ及びロは何れも従来のリフト
オフ装置の使用状態を説明する側面図である。
１……被リフトオフ部材（半導体ウエハ）、３
……ガイドローラ、２……押えローーラ、５……
ローラ部、７……粘着テープ、７ａ……粘着面。
FIG. 1 is a perspective view of a lift-off device according to an embodiment of the present invention, and FIGS. 2A to 2B are side views illustrating an example of use of the lift-off device of the present invention.
FIGS. 3A to 3D are sectional views of essential parts for explaining the lift-off, and FIGS. 4A and 4B are side views for explaining the usage state of the conventional lift-off device. 1... Member to be lifted off (semiconductor wafer), 3
...Guide roller, 2...Press roller, 5...
Roller portion, 7...adhesive tape, 7a...adhesive surface.
補正 平１．５．２５
図面の簡単な説明を次のように補正する。
明細書第１１頁第３行目に「第２図イからロは
何れも」とあるのを「第２図イからニは何れも」
と補正します。Amendment 1.5.25 Hei 1. The brief description of the drawing is amended as follows. In the third line of page 11 of the specification, "All of Figure 2 A to B" has been changed to "All of Figure 2 A to D"
I will correct it.
Claims (1)
離してパターンニングするリフトオフに用いられ
るリフトオフ装置において、 一対の回転自在のガイドローラと上記被リフト
オフ部材を押圧する回転自在の押えローラとを該
押えローラを下側にして逆三角形状に配置してロ
ーラ部を形成し、該ローラ部を水平方向に移動自
在に設けると共に、引張り状態で供給された上記
粘着テープをガイドローラと押えローラ間に略Ｕ
字状に巻き付け、押圧ローラに巻かれた粘着テー
プ外側面を粘着面としたことを特徴とするリフト
オフ装置。[Claim for Utility Model Registration] A lift-off device used for lift-off in which an adhesive tape is attached to a member to be lifted off and then peeled off to form a pattern, comprising a pair of rotatable guide rollers and a rotatable roller that presses the member to be lifted off. A presser roller is arranged in an inverted triangular shape with the presser roller on the lower side to form a roller section, and the roller section is provided so as to be movable in the horizontal direction and guides the adhesive tape supplied under tension. Approximately U between the roller and presser roller
A lift-off device characterized in that the adhesive tape is wound in a letter shape and the outer surface of the adhesive tape wound around a pressure roller is used as an adhesive surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238489U JPH02122429U (en) | 1989-03-22 | 1989-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3238489U JPH02122429U (en) | 1989-03-22 | 1989-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122429U true JPH02122429U (en) | 1990-10-08 |
Family
ID=31258843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3238489U Pending JPH02122429U (en) | 1989-03-22 | 1989-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122429U (en) |
-
1989
- 1989-03-22 JP JP3238489U patent/JPH02122429U/ja active Pending