JPH02122201U - - Google Patents

Info

Publication number
JPH02122201U
JPH02122201U JP3078589U JP3078589U JPH02122201U JP H02122201 U JPH02122201 U JP H02122201U JP 3078589 U JP3078589 U JP 3078589U JP 3078589 U JP3078589 U JP 3078589U JP H02122201 U JPH02122201 U JP H02122201U
Authority
JP
Japan
Prior art keywords
diaphragm
chamber
fixed
seal
elastic body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3078589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3078589U priority Critical patent/JPH02122201U/ja
Publication of JPH02122201U publication Critical patent/JPH02122201U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP3078589U 1989-03-20 1989-03-20 Pending JPH02122201U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3078589U JPH02122201U (no) 1989-03-20 1989-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3078589U JPH02122201U (no) 1989-03-20 1989-03-20

Publications (1)

Publication Number Publication Date
JPH02122201U true JPH02122201U (no) 1990-10-05

Family

ID=31256155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3078589U Pending JPH02122201U (no) 1989-03-20 1989-03-20

Country Status (1)

Country Link
JP (1) JPH02122201U (no)

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