JPH02122070U - - Google Patents
Info
- Publication number
- JPH02122070U JPH02122070U JP3088489U JP3088489U JPH02122070U JP H02122070 U JPH02122070 U JP H02122070U JP 3088489 U JP3088489 U JP 3088489U JP 3088489 U JP3088489 U JP 3088489U JP H02122070 U JPH02122070 U JP H02122070U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- frame
- holding frame
- free rotation
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 2
- 239000007791 liquid phase Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3088489U JPH02122070U (es) | 1989-03-20 | 1989-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3088489U JPH02122070U (es) | 1989-03-20 | 1989-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122070U true JPH02122070U (es) | 1990-10-04 |
Family
ID=31256326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3088489U Pending JPH02122070U (es) | 1989-03-20 | 1989-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122070U (es) |
-
1989
- 1989-03-20 JP JP3088489U patent/JPH02122070U/ja active Pending