JPH02121102U - - Google Patents
Info
- Publication number
- JPH02121102U JPH02121102U JP2971989U JP2971989U JPH02121102U JP H02121102 U JPH02121102 U JP H02121102U JP 2971989 U JP2971989 U JP 2971989U JP 2971989 U JP2971989 U JP 2971989U JP H02121102 U JPH02121102 U JP H02121102U
- Authority
- JP
- Japan
- Prior art keywords
- corrosive fluid
- temperature corrosive
- evaporator
- storage tank
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2971989U JPH0647522Y2 (ja) | 1989-03-17 | 1989-03-17 | 高温腐食性流体の蒸発装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2971989U JPH0647522Y2 (ja) | 1989-03-17 | 1989-03-17 | 高温腐食性流体の蒸発装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02121102U true JPH02121102U (sl) | 1990-10-01 |
JPH0647522Y2 JPH0647522Y2 (ja) | 1994-12-07 |
Family
ID=31254170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2971989U Expired - Lifetime JPH0647522Y2 (ja) | 1989-03-17 | 1989-03-17 | 高温腐食性流体の蒸発装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0647522Y2 (sl) |
-
1989
- 1989-03-17 JP JP2971989U patent/JPH0647522Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0647522Y2 (ja) | 1994-12-07 |