JPH02120844U - - Google Patents
Info
- Publication number
- JPH02120844U JPH02120844U JP2923989U JP2923989U JPH02120844U JP H02120844 U JPH02120844 U JP H02120844U JP 2923989 U JP2923989 U JP 2923989U JP 2923989 U JP2923989 U JP 2923989U JP H02120844 U JPH02120844 U JP H02120844U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- line sensor
- orientation flat
- positioning device
- wafer positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2923989U JPH02120844U (tr) | 1989-03-15 | 1989-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2923989U JPH02120844U (tr) | 1989-03-15 | 1989-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02120844U true JPH02120844U (tr) | 1990-09-28 |
Family
ID=31253280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2923989U Pending JPH02120844U (tr) | 1989-03-15 | 1989-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02120844U (tr) |
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1989
- 1989-03-15 JP JP2923989U patent/JPH02120844U/ja active Pending