JPH02120834U - - Google Patents
Info
- Publication number
- JPH02120834U JPH02120834U JP2849689U JP2849689U JPH02120834U JP H02120834 U JPH02120834 U JP H02120834U JP 2849689 U JP2849689 U JP 2849689U JP 2849689 U JP2849689 U JP 2849689U JP H02120834 U JPH02120834 U JP H02120834U
- Authority
- JP
- Japan
- Prior art keywords
- drying
- carrier
- semiconductor wafer
- supporting part
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims 11
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000004140 cleaning Methods 0.000 claims 3
- 239000011148 porous material Substances 0.000 claims 1
- 238000004080 punching Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2849689U JPH02120834U (hu) | 1989-03-15 | 1989-03-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2849689U JPH02120834U (hu) | 1989-03-15 | 1989-03-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02120834U true JPH02120834U (hu) | 1990-09-28 |
Family
ID=31251910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2849689U Pending JPH02120834U (hu) | 1989-03-15 | 1989-03-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02120834U (hu) |
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1989
- 1989-03-15 JP JP2849689U patent/JPH02120834U/ja active Pending