JPH02120007U - - Google Patents
Info
- Publication number
- JPH02120007U JPH02120007U JP2963489U JP2963489U JPH02120007U JP H02120007 U JPH02120007 U JP H02120007U JP 2963489 U JP2963489 U JP 2963489U JP 2963489 U JP2963489 U JP 2963489U JP H02120007 U JPH02120007 U JP H02120007U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- film thickness
- air
- detector
- delivery means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2963489U JPH0648327Y2 (ja) | 1989-03-14 | 1989-03-14 | 膜厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2963489U JPH0648327Y2 (ja) | 1989-03-14 | 1989-03-14 | 膜厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02120007U true JPH02120007U (it) | 1990-09-27 |
| JPH0648327Y2 JPH0648327Y2 (ja) | 1994-12-12 |
Family
ID=31254014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2963489U Expired - Lifetime JPH0648327Y2 (ja) | 1989-03-14 | 1989-03-14 | 膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648327Y2 (it) |
-
1989
- 1989-03-14 JP JP2963489U patent/JPH0648327Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648327Y2 (ja) | 1994-12-12 |