JPH021191A - Laser oscillating device - Google Patents
Laser oscillating deviceInfo
- Publication number
- JPH021191A JPH021191A JP63050150A JP5015088A JPH021191A JP H021191 A JPH021191 A JP H021191A JP 63050150 A JP63050150 A JP 63050150A JP 5015088 A JP5015088 A JP 5015088A JP H021191 A JPH021191 A JP H021191A
- Authority
- JP
- Japan
- Prior art keywords
- distribution
- resonator
- output coupling
- gaussian
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims abstract description 20
- 238000010168 coupling process Methods 0.000 claims abstract description 20
- 238000005859 coupling reaction Methods 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000010355 oscillation Effects 0.000 claims 1
- 238000002834 transmittance Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 235000021438 curry Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- OOYGSFOGFJDDHP-KMCOLRRFSA-N kanamycin A sulfate Chemical group OS(O)(=O)=O.O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CN)O[C@@H]1O[C@H]1[C@H](O)[C@@H](O[C@@H]2[C@@H]([C@@H](N)[C@H](O)[C@@H](CO)O2)O)[C@H](N)C[C@@H]1N OOYGSFOGFJDDHP-KMCOLRRFSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
ザ用の共振器に関する。より詳細には簡単な共振器構造
から高出力ＴＥＭ００モードビームを得られるようにし
たレーザ発振装置
〔従来の技術〕
第４図に従来技術による高出力ＴＥＭ００レーザ発振器
の構造を示す。図においては、モードを規定する共振器
と放電管構造のみを示し、周知の高速軸流ＣＯ□レーザ
装置が適用できるので、ガス循環装置については省略し
である。図は放電管ｌ、２の２本からなる２段折り返し
型共振器であって３は出力結合鏡、４は全反射鏡、５．
６は折り返し鏡である。電極７．８．９．１０などには
直流高電圧が印加されて放電管内にグロー放電が発生し
、レーザ励起が行われる。その結果共振器にレーザビー
ム１１が、共振器外にレーザビームＩ２が発生する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a resonator for a laser. More specifically, a laser oscillator capable of obtaining a high-output TEM00 mode beam from a simple resonator structure [Prior art] FIG. 4 shows the structure of a high-output TEM00 laser oscillator according to the prior art. In the figure, only the resonator and discharge tube structure that define the mode are shown, and the gas circulation device is omitted because a well-known high-speed axial flow CO□ laser device can be applied. The figure shows a two-stage folded resonator consisting of two discharge tubes 1 and 2, in which 3 is an output coupling mirror, 4 is a total reflection mirror, and 5.
6 is a folding mirror. A high direct current voltage is applied to the electrodes 7, 8, 9, 10, etc., and a glow discharge is generated within the discharge tube, and laser excitation is performed. As a result, a laser beam 11 is generated in the resonator, and a laser beam I2 is generated outside the resonator.
本発明は加工用ＣＯｚ レーザなどの高山カレー〔発明
が解決しようとする課題〕
従来技術には下記に挙げる欠点がある。第一は放電管も
共振器も極めて長大になることである。The present invention relates to high mountain curry processing such as a COz laser for processing [Problems to be Solved by the Invention] The prior art has the following drawbacks. First, both the discharge tube and the resonator are extremely long.
出力ＩＫＷをＴＥＭ００で得る場合を考察する。Consider the case where the output IKW is obtained with TEM00.
我々の実験によると放電管径を制限してＴＥＭ００モー
ドを得るには通常のＲ＝１０〜３０（凹）の光学部品を
用いる時には放電管内径は１６＋ｎ＋ｎφ以下でなけれ
ばならない。出力ＩＫＷを得るためには通常の高速軸流
型ＣＯ□レーザの場合の単位体積出力比を２Ｗ／ｃｃと
すると５００ｃｃの放電体積を必要とするのでを効放電
長は２．５ｍ必要である。実際には共振器長はこれより
も大分長いものになる。According to our experiments, in order to limit the diameter of the discharge tube and obtain the TEM00 mode, the inner diameter of the discharge tube must be 16+n+nφ or less when using a normal optical component with R=10 to 30 (concave). In order to obtain the output IKW, a discharge volume of 500 cc is required, assuming a unit volume output ratio of 2 W/cc in the case of a normal high-speed axial CO□ laser, and an effective discharge length of 2.5 m is required. In reality, the resonator length will be much longer than this.
装置の長さを短くするためには図に示すように何段かに
折り返し構造にする。この時レーザのアラインメントが
敏感になり、装置は精密袋［〃になってしまい取扱いに
困難をきたす。In order to shorten the length of the device, it should be folded in several stages as shown in the figure. At this time, the laser alignment becomes sensitive and the device becomes a precision bag, making it difficult to handle.
これを防止するには５００ｃｃの放電体積を大断面短管
放電管で得ることが考えられる。例えば、下記の長さＬ
と内径りの組合せが考えられる。To prevent this, it is conceivable to obtain a discharge volume of 500 cc with a large-section short tube discharge tube. For example, the following length L
A combination of this and the inner diameter is possible.
Ｌ Ｄ
３００ ｔｍｎ ４６ ｍｍφ５００
３に
れらのり、Ｄは共振器構成上では理想的と云える。しか
しながらこれらのり、Ｄを採用すると第一に直流放電で
は−様な放電が得られない。L D 300 tmn 46 mmφ500
3 and D can be said to be ideal in terms of the resonator configuration. However, when these glues and D are employed, firstly, -like discharge cannot be obtained in direct current discharge.
第二にＴＥＭ００は得られず、極端なマルチモードにな
ってしまう。Second, TEM00 cannot be obtained, resulting in extreme multi-mode.
本発明では上記課題を解決するために、高周波放電でレ
ーザ励起を行う単管放電菅からなる気体レーザ装置にお
いて、
出力結合鏡上の出力結合係数が、共振器外のレーザビー
ム強度分布のガウシャン（Ｇａｕｓｓｉａｎ）分布と等
しくなるような分布を有することを特１ｒ１．とするガ
スレーザ装置が、提供される。In order to solve the above problems, the present invention provides a gas laser device consisting of a single-tube discharge tube that performs laser excitation using high-frequency discharge. Gaussian) distribution. A gas laser device is provided.
〔作用］
出力結合鏡の出力結合係数がガウシャン分布となってい
るので、レーザ発振器の出力ビームの分布がガウシャン
分布となり、そのまま加工用ビームとして使用できる。[Operation] Since the output coupling coefficient of the output coupling mirror has a Gaussian distribution, the distribution of the output beam of the laser oscillator has a Gaussian distribution, and can be used as a processing beam as is.
〔実施例］ 以下、本発明の一実施例を図面に基づいて説明する。〔Example] Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１回に本発明のガスレーザ装置の実施例を示す。図に
示すように、長さが短く断面が大きな単管放電菅１から
構成される。３は出力結合鏡、４は全反射鏡１１は共振
器内レーザビーム、１２は共振器外レーザビームである
。In the first part, an embodiment of the gas laser device of the present invention will be shown. As shown in the figure, it is composed of a single tube discharge tube 1 that is short in length and large in cross section. 3 is an output coupling mirror, 4 is a total reflection mirror 11 for an intracavity laser beam, and 12 is an extracavity laser beam.
図に示したように誘電体放電管１の外部に電極１３．１
４が設置されており、それらに高周波型ｒＸ１５から高
周波高電圧が印加される。直流放電の場合と異なり、大
断面放電管であっても一様放電が得られる。As shown in the figure, an electrode 13.1 is provided on the outside of the dielectric discharge tube 1.
4 are installed, and a high frequency high voltage is applied to them from a high frequency type rX15. Unlike the case of DC discharge, uniform discharge can be obtained even with a large-section discharge tube.
第２図に出力結合鏡の透過分布率が−様な場合のビーム
プロファイルの例を示す。図に打いて、Ｐａはビームプ
ロファイル、３は出力結合鏡、Ｔａは透過率分布である
。すなわち、透過率分布Ｔａが−様な場合はビームプロ
ファイルＰａは図に示すような極端なマルチモードで発
振する。FIG. 2 shows an example of a beam profile when the output coupling mirror has a -like transmission distribution. In the figure, Pa is the beam profile, 3 is the output coupling mirror, and Ta is the transmittance distribution. That is, when the transmittance distribution Ta is -like, the beam profile Pa oscillates in an extreme multimode as shown in the figure.
第３図に出力結合鏡の透過分布率がガウシャン（Ｇａｕ
ｓｓｉａｎ）分布の場合のビームプロファイルの例を示
す。図において、Ｐｂはビームプロファイル、３は出力
結合鏡、Ｔｂは透過率分布である。すなわち、透過率分
布Ｔｂが図のようにガウシャン分布になっていると、ビ
ームプロファイルＰｂは図に示すようなガウシャン分布
となる。Figure 3 shows that the transmission distribution rate of the output coupling mirror is Gaussian (Gausian).
An example of a beam profile in the case of a ssian) distribution is shown. In the figure, Pb is a beam profile, 3 is an output coupling mirror, and Tb is a transmittance distribution. That is, if the transmittance distribution Tb has a Gaussian distribution as shown in the figure, the beam profile Pb has a Gaussian distribution as shown in the figure.
このようにして作られたガウシャンビームであっても伝
搬特性は共振器内で作られたガウシャンビームと変わる
ことがないので通常のＴＥＭ００レーザビームの長所は
そのまま残る。Even with the Gaussian beam created in this way, the propagation characteristics are the same as those of the Gaussian beam created within a resonator, so the advantages of the normal TEM00 laser beam remain.
ただし、このままではビーム径が大きすぎる場合には縮
小光学系でビーム径だけを任意の値まで縮小して使用す
ることができる。However, if the beam diameter is too large as it is, the beam diameter can be reduced to an arbitrary value using a reduction optical system.
以上説明したように本発明では、出力結合鏡の結合係数
をガウシャン分布としたので、共振器長の短い中段共振
器からＴＥＭ００モードに等価的な高出力レーザビーム
が得られる。また、装置形状が小さくなり、機構構造が
簡略化され、アラインメントが緩和される。As explained above, in the present invention, since the coupling coefficient of the output coupling mirror is Gaussian distributed, a high-power laser beam equivalent to the TEM00 mode can be obtained from the middle stage resonator with a short resonator length. Additionally, the device size is reduced, the mechanical structure is simplified, and alignment is relaxed.
５． ７〜１ ■ １３、１ 折り返し鏡 ・−−−−−・−電極 一共振器内レーザビーム光軸 ・−同外光軸 電極 ・・−・高周波電源5. 7-1 ■ 13, 1 folding mirror ・－－－－－・－Electrode Laser beam optical axis within one cavity ・−External optical axis electrode ・・・−・High frequency power supply
第１図は本発明のガスレーザ装置の構成図、第２図は出
力結合鏡の透過分布率が−様な場合のビームプロファイ
ルの例ｆ示を図、
第３図は出力結合鏡の透過分布率がガウシャン分布であ
る場合のビームプロファイルの例を示す図、
第４図は従来技術による高出力ＴＥＭ００レーザ発振器
の構造を示す図である。
上記出願人 ファナンク株式会社
代理人 弁理士 服部毅巖
■、２・−一−−−−−−−−−・・−放電管３−−−
−−−−−−・−出力結合鏡
４−−−−−・−一−−−−−−−全反射鏡Ｐａビー４
７０口ファイル
３出力鮎今４免
Ｔａ透帽）千
第２図
第１図
ｐｂヒームプロフ？イル
３出力叶今鏡
Ｔｂ透過千分千Fig. 1 is a configuration diagram of the gas laser device of the present invention, Fig. 2 shows an example of a beam profile when the transmission distribution ratio of the output coupling mirror is -, and Fig. 3 shows the transmission distribution ratio of the output coupling mirror. FIG. 4 is a diagram showing an example of a beam profile when is a Gaussian distribution. FIG. 4 is a diagram showing the structure of a high-power TEM00 laser oscillator according to the prior art. The above applicant Fananku Co., Ltd. Agent Patent attorney Takeshi Hattori■, 2・-1------------Discharge tube 3---
---------・- Output coupling mirror 4 --------・-1 --------- Total reflection mirror Pa Bee 4
70 mouth file 3 output Ayu now 4men Ta transparent hat) 1000th figure 2nd figure 1 pb heem profile? Il 3 output Kano now mirror Tb transmission 1000 minutes
Claims (2)
る気体レーザ装置において、 出力結合鏡上の出力結合係数に関しては、共振器外のレ
ーザビーム強度分布がガウシャン（Ｇａｕｓｓｉａｎ）
分布と等しくなるような分布を有することを特徴とする
ガスレーザ装置。(1) In a gas laser device consisting of a single-tube discharge tube that excites the laser with high-frequency discharge, the output coupling coefficient on the output coupling mirror is such that the laser beam intensity distribution outside the resonator is Gaussian.
A gas laser device characterized by having a distribution equal to the distribution.
とを特徴とする特許請求の範囲第１項記載のレーザ発振
装置。(2) The laser oscillation device according to claim 1, further comprising an external reduction optical system for reducing the beam system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63050150A JPH021191A (en) | 1988-03-03 | 1988-03-03 | Laser oscillating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63050150A JPH021191A (en) | 1988-03-03 | 1988-03-03 | Laser oscillating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021191A true JPH021191A (en) | 1990-01-05 |
Family
ID=12851158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63050150A Pending JPH021191A (en) | 1988-03-03 | 1988-03-03 | Laser oscillating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021191A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62174990A (en) * | 1986-01-29 | 1987-07-31 | Fanuc Ltd | High-frequency excitation coaxial co2 laser |
| JPS62189781A (en) * | 1986-02-17 | 1987-08-19 | Kokuritsu Kogai Kenkyusho | Laser resonator |
-
1988
- 1988-03-03 JP JP63050150A patent/JPH021191A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62174990A (en) * | 1986-01-29 | 1987-07-31 | Fanuc Ltd | High-frequency excitation coaxial co2 laser |
| JPS62189781A (en) * | 1986-02-17 | 1987-08-19 | Kokuritsu Kogai Kenkyusho | Laser resonator |
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