JPH02118929U - - Google Patents

Info

Publication number
JPH02118929U
JPH02118929U JP2778089U JP2778089U JPH02118929U JP H02118929 U JPH02118929 U JP H02118929U JP 2778089 U JP2778089 U JP 2778089U JP 2778089 U JP2778089 U JP 2778089U JP H02118929 U JPH02118929 U JP H02118929U
Authority
JP
Japan
Prior art keywords
wafer
blade
demounding
optical sensor
mounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2778089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2778089U priority Critical patent/JPH02118929U/ja
Publication of JPH02118929U publication Critical patent/JPH02118929U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2778089U 1989-03-09 1989-03-09 Pending JPH02118929U (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2778089U JPH02118929U (ru) 1989-03-09 1989-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2778089U JPH02118929U (ru) 1989-03-09 1989-03-09

Publications (1)

Publication Number Publication Date
JPH02118929U true JPH02118929U (ru) 1990-09-25

Family

ID=31250574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2778089U Pending JPH02118929U (ru) 1989-03-09 1989-03-09

Country Status (1)

Country Link
JP (1) JPH02118929U (ru)

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