JPH02118929U - - Google Patents
Info
- Publication number
- JPH02118929U JPH02118929U JP2778089U JP2778089U JPH02118929U JP H02118929 U JPH02118929 U JP H02118929U JP 2778089 U JP2778089 U JP 2778089U JP 2778089 U JP2778089 U JP 2778089U JP H02118929 U JPH02118929 U JP H02118929U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- blade
- demounding
- optical sensor
- mounds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2778089U JPH02118929U (ru) | 1989-03-09 | 1989-03-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2778089U JPH02118929U (ru) | 1989-03-09 | 1989-03-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02118929U true JPH02118929U (ru) | 1990-09-25 |
Family
ID=31250574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2778089U Pending JPH02118929U (ru) | 1989-03-09 | 1989-03-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02118929U (ru) |
-
1989
- 1989-03-09 JP JP2778089U patent/JPH02118929U/ja active Pending
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