JPH02118927U - - Google Patents
Info
- Publication number
- JPH02118927U JPH02118927U JP2778289U JP2778289U JPH02118927U JP H02118927 U JPH02118927 U JP H02118927U JP 2778289 U JP2778289 U JP 2778289U JP 2778289 U JP2778289 U JP 2778289U JP H02118927 U JPH02118927 U JP H02118927U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- support means
- semiconductor
- horizontal direction
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2778289U JPH02118927U (cs) | 1989-03-09 | 1989-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2778289U JPH02118927U (cs) | 1989-03-09 | 1989-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118927U true JPH02118927U (cs) | 1990-09-25 |
Family
ID=31250578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2778289U Pending JPH02118927U (cs) | 1989-03-09 | 1989-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118927U (cs) |
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1989
- 1989-03-09 JP JP2778289U patent/JPH02118927U/ja active Pending