JPH02118552U - - Google Patents
Info
- Publication number
- JPH02118552U JPH02118552U JP2676189U JP2676189U JPH02118552U JP H02118552 U JPH02118552 U JP H02118552U JP 2676189 U JP2676189 U JP 2676189U JP 2676189 U JP2676189 U JP 2676189U JP H02118552 U JPH02118552 U JP H02118552U
- Authority
- JP
- Japan
- Prior art keywords
- case
- bellows
- driving means
- screw shaft
- controlled rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Reciprocating Pumps (AREA)
- External Artificial Organs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2676189U JPH02118552U (sv) | 1989-03-09 | 1989-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2676189U JPH02118552U (sv) | 1989-03-09 | 1989-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118552U true JPH02118552U (sv) | 1990-09-25 |
Family
ID=31248680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2676189U Pending JPH02118552U (sv) | 1989-03-09 | 1989-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118552U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006184989A (ja) * | 2004-12-27 | 2006-07-13 | Dainippon Screen Mfg Co Ltd | 液体供給装置、基板処理装置および液体供給方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55134606A (en) * | 1979-04-10 | 1980-10-20 | Toray Ind Inc | Controller for quantity of overfiltration |
| JPS5613949A (en) * | 1979-07-13 | 1981-02-10 | Aresu Kikaku Kk | Measuring instrument for quantity of water removed in artificial kidney device |
-
1989
- 1989-03-09 JP JP2676189U patent/JPH02118552U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55134606A (en) * | 1979-04-10 | 1980-10-20 | Toray Ind Inc | Controller for quantity of overfiltration |
| JPS5613949A (en) * | 1979-07-13 | 1981-02-10 | Aresu Kikaku Kk | Measuring instrument for quantity of water removed in artificial kidney device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006184989A (ja) * | 2004-12-27 | 2006-07-13 | Dainippon Screen Mfg Co Ltd | 液体供給装置、基板処理装置および液体供給方法 |