JPH0211715Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of an electron gun moving mechanism incorporated in an electron beam device.

[Prior Art] Electron beam devices such as electron beam welding machines use a horizontally oriented electron gun in which the electron gun is mounted horizontally. It is constructed so that it can be separated from the main body in which the electron optical system is housed in order to clean the interior of the room. FIG. 10 shows a conventional device for such a horizontal electron gun, in which guide shafts 5a and 5b are slidable on a bearing 3 fixed to the main body 1 via a block 4 fixed to the electron gun section 2. A stopper 6 is provided at the end of the guide shaft 5a. The main body 1 also has an exhaust port 7 connected to a vacuum pump (not shown), and the main body 1 and the electron gun 2 maintain a vacuum by bringing the gasket 8 and the gasket surface 9 into close contact with each other. . 10 is a diagram showing a state in which the electron gun section 2 is closely connected to the main body section 1, and FIG. 11 shows a state in which the electron gun section 2 is moved in the horizontal direction (direction B in FIG. 10) and the stopper is moved. 6 is a diagram illustrating a state in which the device is stopped at 6 and separated from the main body portion 1. FIG.

[Problems to be solved by the invention] By the way, in the conventional device configured as described above, when the electron gun section 2 and the main body section 1 are separated for cleaning the inside of the electron gun chamber, etc., after the work is finished, In order to accurately connect the electron gun section 2 and the main body section 1,
The electron gun section 2 must be pressed against the main body section 1 by hand or with a bolt until the main body section 1 is evacuated by a vacuum pump not shown and atmospheric pressure is applied to the electron gun section 2, making the operation complicated. There was a drawback. Electron gun section 2 to solve such drawbacks
It is conceivable to automatically move it using a drive source and press it against the main body part 1, but there is a danger that fingers or the like may be accidentally caught.

The object of the present invention is to solve the above-mentioned drawbacks and provide a device with improved work safety and operability.

[Means for solving the problem] The configuration of the present invention for solving the problem includes an electron gun section, a main body section housing an electron optical system that can be separated from the electron gun section, and the main body section. In the apparatus, the device includes means attached to the main body for guiding the movement of the electron gun in the horizontal direction, and a piston movable within a cylinder attached to the main body and mechanically connected to the electron gun. , a gas supply source for supplying gas into a cylinder partitioned by the piston, and a solenoid valve controlling the supply of gas to two chambers partitioned by the piston of the cylinder;
a control circuit for switching and supplying a signal to the solenoid valve from a drive power source for driving the solenoid valve;
means for detecting that the electron gun section separated from the main body section approaches within a certain distance d from the main body section;
It is characterized by further comprising means for controlling the solenoid valve based on an output signal from the detection means and pressing the electron gun part against the main body part by the piston only when the electron gun part approaches within the certain distance d. It is said that

[Examples] Examples of the present invention will be described below in detail based on the accompanying drawings.

FIG. 1 is a block diagram of a device according to an embodiment of the present invention, and FIGS. 2A to 2D are diagrams showing an example of a control circuit for controlling this device and its operating state. Furthermore, the 10th
Components that are the same as those of the conventional device shown in the figure are given the same numbers and their explanations will be omitted. In FIG. 1, 11 is a cylinder fixed to the main body 1 via a bearing 3, 5 is a guide shaft, and 10 is a shaft connected to a piston moving inside the cylinder 11, and the guide shaft 5 and the shaft 10 is fixed to the electron gun section 2 via a block 4. 12 is a limit switch fixed to the main body 1; 13 is a contact fitting fixed to the electron gun section 2 and in contact with the limit switch 12;

The air connection port 11a of the cylinder 11 is connected to an air supply source 16 via a multi-coil type 5-port solenoid valve 14 (hereinafter abbreviated as solenoid valve 14), and the air connection port 11b is connected to a single-coil type 3-port type solenoid valve 14 (hereinafter abbreviated as solenoid valve 14). It is connected to an air supply source 16 via a port type solenoid valve 15 (hereinafter abbreviated as solenoid valve 15) and solenoid valve 14. 14a and 14b are solenoid coils of the electromagnetic valve 14, 15a is a solenoid coil of the electromagnetic valve 15, and 15c is a blind plug.

In Fig. 2A, 17 indicates the solenoid valves 14 and 1.
5 is a drive power source for driving the solenoid coil, and 18 is a control circuit for switching and supplying a signal from the drive power source to each electromagnetic valve. Ra ₁ to _{Ra 3} , Rb ₁ to Rb ₄ and Rc ₁ in the control circuit 18 are contacts of relays Ra, Rb and Rc, respectively. The relay contacts Ra ₁ , Rb ₁ , Rb ₄ , Rc ₁ are normally open relay contacts, and the relay contacts Ra ₂ , Ra ₃ .
The Rb ₂ and Rb ₃ relays are normally closed relay contacts. Also, Ra is a relay coil for simultaneously operating each relay of Ra ₁ to _{Ra 3} , and similarly, Rb and Rc are relay contacts Rb ₁ to Rb ₄ , respectively.
This is a relay coil for operating Rc ₁ at the same time. 18a, 18b and 18c are solenoid coil selection switches. 19 is a relay power supply that supplies exciting current to each relay coil in the control circuit 18. 20 are selection switches 18a, 18b,
switch 20a for turning on/off 18c;
This is an operation panel to which 20b and 20c are attached.

In the apparatus constructed as described above, FIG. 1 shows the normal operating state when the button switch 20a of the operation panel 20 is pressed. In this state, as shown in FIG. 2B, the selection switch 18a in the control circuit 18 is turned on, and the relay coil
Since Ra is excited and the relay contact Ra ₁ is turned on, the solenoid coil 14a of the solenoid valve 14 is turned on (solenoid coil 14b is turned off), and the solenoid coil 15a of the solenoid valve 15 is turned off. In this state, compressed air from the air supply source 16 is supplied to the chamber P in the cylinder 11 via the solenoid valve 14 and the air connection port 11a, and the chamber Q in the cylinder 11 is supplied to the chamber P in the cylinder 11 via the solenoid valve 14 and the air connection port 11b. Valve 1
5 and the solenoid valve 14 to the outside, and is at atmospheric pressure. Therefore, a force in the direction A is applied to the piston connected to the shaft 10, and the main body portion 1 and the electron gun portion 2 are connected with the gasket 8 and gasket surface 9 in close contact. In this state, the inside of the electron gun section 2 can also be evacuated via the inside of the main body section 1 by the vacuum pump.

Next, when moving the electron gun section 2 to perform work such as replacing the filament, press the button switch 20b.
is turned on (at this time, the switch 20a is turned off). As a result of this operation, the selection switch _18b is turned on as shown in FIG. Solenoid coil 15a
is in the off state. In this state, compressed air from the air supply source 16 is supplied to the solenoid valve 14 and the solenoid valve 1.
5. The air is supplied to the room Q inside the cylinder 11 through the air connection port 11b. On the other hand, since the room P communicates with the outside through the solenoid valve 15 connected to the air connection port 11a, the pressure is at atmospheric pressure.
As shown in Figure 3, the piston connected to
Since the force is applied in the direction, the electron gun section 2 also moves in the B direction until it is stopped by the stopper 6 and is separated from the main body section 1. In this state, the piston continues to receive force in the B direction, so a force in the opposite direction, that is, in the A direction, acts on the electron gun section 2, and the electron gun section 2 remains in the state shown in FIG. 3 without moving. work safety is maintained.

At this point, the work such as replacing the filament is completed,
When connecting the electron gun section 2 and the main body section 1, turn on the switch 20c on the operation panel 20. By this operation, the selection switch 18c of the control circuit 18 is turned on, the relay coil Rc is excited, and the relay contact _Rc1 is turned on. Therefore, the solenoid coil 14a remains off (14b is on), and the solenoid coil 15a is turned on. FIG. 4 shows this state. In this state, compressed air from the air supply source 16 passes through the solenoid valve 14 and is stopped by the blind plug 15c of the solenoid valve 15. Therefore, the two chambers P and Q are communicated to the outside through the electromagnetic valves 14 and 15 and have atmospheric pressure, and the electron gun section 2 is in a state where it can be moved manually.
In this state, manually move the electron gun section 2 in the direction A, and adjust the distance d between the sealing surfaces 8 and 9 to a safe distance, such as 550, so that the operator's fingers will not get caught.
Get as close as a millimeter. Due to this movement of the electron gun section 2, the contact fitting 13 fixed to the electron gun section 2 comes into contact with the limit switch 12, so that the position detection signal from the limit switch 12 is transmitted to the operation panel 20.
The switch 20a of the control circuit 18 is operated, and the selection switch 18a of the control circuit 18 is turned on (18b and 18c are turned off) to return to the state shown in FIG.
In this state, solenoid coil 14a is switched on, solenoid coil 14b is switched off, and solenoid coil 15a is switched off.

FIG. 5 shows this state. In this state, compressed air from the air supply source 16 is supplied to the solenoid valve 1.
4 and the air connection port 11a to the room P, and the room Q is supplied with the air connection port 11b, the solenoid valve 15,
The pressure becomes atmospheric through the solenoid valve 14. As a result, the piston moves in the A direction, and therefore the electron gun section 2 also moves in the A direction.
The electron gun section 1 and the main body section 1 are easily connected to each other and return to the state shown in FIG. 1.

In this embodiment, the solenoid coil 14a is turned off due to a power outage, power supply trouble, etc. while the electron gun shown in FIG. Since the state of the solenoid valve 14 does not change even if
does not move in the A direction.

Note that this embodiment is merely an example, and modifications are possible.

In this embodiment, the air connection port 11a and the solenoid valve 14 are directly connected, but as shown in FIG. When moving in the direction, the movement may be adjusted by discharge resistance. Also, instead of the single coil type 3 port type solenoid valve 15, a single coil 5 as shown in FIG.
A port-type solenoid valve 22 or a multi-coil type three-port solenoid valve 23 as shown in FIG. 8 may be used.

Further, as shown in FIG. 9, the same effect can be obtained by using two multi-coil type five-port electromagnetic valves 15.

[Effects of the invention] As detailed above, according to the invention, when the electron gun moves toward the main body to a distance below the set distance d without the risk of pinching fingers, a force is applied to press the electron gun against the main body. Therefore, an electron gun moving mechanism for an electron beam device with improved work safety and operability is provided.

[Brief explanation of drawings]

Fig. 1 is a configuration diagram showing one embodiment of the present invention;
Figures 1 to 2 are diagrams showing an example of a control circuit for controlling this device and its operating states, Figures 3 to 5 are diagrams for explaining the operating states, and Figures 6 to 9 are examples of embodiments. 10 and 11 are diagrams for explaining a conventional device. 1... Body part, 2... Electron gun part, 3... Bearing,
4... Block, 5... Guide shaft, 6... Stopper, 7... Exhaust port, 8... Packing, 9... Packing surface, 10... Shaft, 11... Cylinder, 12
... Limit switch, 13 ... Contact fitting, 14
... Solenoid valve, 14a, 14b ... Solenoid coil, 15 ... Solenoid valve, 15a ... Solenoid coil, 15c ... Blind plug, 16 ... Air supply source, 1
7... Drive power supply, 18... Control circuit, 19... Relay power supply, 20... Operation panel, 21... Flow rate adjustment valve, 22, 23... Solenoid valve.

Claims (1)

[Scope of utility model registration request] An apparatus comprising an electron gun section, a main body section housing an electron optical system that is separable from the electron gun section, and means attached to the main body section for guiding horizontal movement of the electron gun section. a piston movable within a cylinder attached to the main body and mechanically connected to the electron gun; a gas supply source for supplying gas into the cylinder partitioned by the piston; a solenoid valve that controls the supply of gas to two chambers partitioned by a piston of a cylinder; a control circuit that switches and supplies a signal from a drive power source to the solenoid valve; means for detecting that the electron gun separated from the main body approaches within a certain distance d from the main body, and controlling the electromagnetic valve based on an output signal from the detection means so that the electron gun approaches within the certain distance d. An electron gun part moving mechanism for an electron beam device, comprising means for pressing the electron gun part against the main body part by the piston only when the electron gun part approaches.