JPH02115868U - - Google Patents
Info
- Publication number
- JPH02115868U JPH02115868U JP2413589U JP2413589U JPH02115868U JP H02115868 U JPH02115868 U JP H02115868U JP 2413589 U JP2413589 U JP 2413589U JP 2413589 U JP2413589 U JP 2413589U JP H02115868 U JPH02115868 U JP H02115868U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- guide
- door
- hole provided
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2413589U JPH02115868U (es) | 1989-03-02 | 1989-03-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2413589U JPH02115868U (es) | 1989-03-02 | 1989-03-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02115868U true JPH02115868U (es) | 1990-09-17 |
Family
ID=31243723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2413589U Pending JPH02115868U (es) | 1989-03-02 | 1989-03-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02115868U (es) |
-
1989
- 1989-03-02 JP JP2413589U patent/JPH02115868U/ja active Pending