JPH02115559U - - Google Patents
Info
- Publication number
- JPH02115559U JPH02115559U JP2318389U JP2318389U JPH02115559U JP H02115559 U JPH02115559 U JP H02115559U JP 2318389 U JP2318389 U JP 2318389U JP 2318389 U JP2318389 U JP 2318389U JP H02115559 U JPH02115559 U JP H02115559U
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- discharge pipe
- pipe
- supply valve
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2318389U JPH02115559U (en, 2012) | 1989-02-28 | 1989-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2318389U JPH02115559U (en, 2012) | 1989-02-28 | 1989-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02115559U true JPH02115559U (en, 2012) | 1990-09-17 |
Family
ID=31241959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2318389U Pending JPH02115559U (en, 2012) | 1989-02-28 | 1989-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02115559U (en, 2012) |
-
1989
- 1989-02-28 JP JP2318389U patent/JPH02115559U/ja active Pending