JPH02115341U - - Google Patents

Info

Publication number
JPH02115341U
JPH02115341U JP2429489U JP2429489U JPH02115341U JP H02115341 U JPH02115341 U JP H02115341U JP 2429489 U JP2429489 U JP 2429489U JP 2429489 U JP2429489 U JP 2429489U JP H02115341 U JPH02115341 U JP H02115341U
Authority
JP
Japan
Prior art keywords
plate member
vacuum suction
suction hole
fixed end
wafer transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2429489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2429489U priority Critical patent/JPH02115341U/ja
Publication of JPH02115341U publication Critical patent/JPH02115341U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Framework For Endless Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP2429489U 1989-03-02 1989-03-02 Pending JPH02115341U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2429489U JPH02115341U (enrdf_load_stackoverflow) 1989-03-02 1989-03-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2429489U JPH02115341U (enrdf_load_stackoverflow) 1989-03-02 1989-03-02

Publications (1)

Publication Number Publication Date
JPH02115341U true JPH02115341U (enrdf_load_stackoverflow) 1990-09-14

Family

ID=31244027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2429489U Pending JPH02115341U (enrdf_load_stackoverflow) 1989-03-02 1989-03-02

Country Status (1)

Country Link
JP (1) JPH02115341U (enrdf_load_stackoverflow)

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