JPH02115341U - - Google Patents
Info
- Publication number
- JPH02115341U JPH02115341U JP2429489U JP2429489U JPH02115341U JP H02115341 U JPH02115341 U JP H02115341U JP 2429489 U JP2429489 U JP 2429489U JP 2429489 U JP2429489 U JP 2429489U JP H02115341 U JPH02115341 U JP H02115341U
- Authority
- JP
- Japan
- Prior art keywords
- plate member
- vacuum suction
- suction hole
- fixed end
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000149 penetrating effect Effects 0.000 claims 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Framework For Endless Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2429489U JPH02115341U (cs) | 1989-03-02 | 1989-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2429489U JPH02115341U (cs) | 1989-03-02 | 1989-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02115341U true JPH02115341U (cs) | 1990-09-14 |
Family
ID=31244027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2429489U Pending JPH02115341U (cs) | 1989-03-02 | 1989-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02115341U (cs) |
-
1989
- 1989-03-02 JP JP2429489U patent/JPH02115341U/ja active Pending