JPH02115244U - - Google Patents

Info

Publication number

JPH02115244U

JPH02115244U JP2397289U JP2397289U JPH02115244U JP H02115244 U JPH02115244 U JP H02115244U JP 2397289 U JP2397289 U JP 2397289U JP 2397289 U JP2397289 U JP 2397289U JP H02115244 U JPH02115244 U JP H02115244U

Authority

JP

Japan

Prior art keywords

ion source

waveguide

dielectric

coil

source chamber

Prior art date

1989-03-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

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• 230000001133 acceleration Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 230000001629 suppression Effects 0.000 description 1