JPH02115200U - - Google Patents

Info

Publication number
JPH02115200U
JPH02115200U JP2317089U JP2317089U JPH02115200U JP H02115200 U JPH02115200 U JP H02115200U JP 2317089 U JP2317089 U JP 2317089U JP 2317089 U JP2317089 U JP 2317089U JP H02115200 U JPH02115200 U JP H02115200U
Authority
JP
Japan
Prior art keywords
electron beam
grid
workpiece
transport
filament
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2317089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720640Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2317089U priority Critical patent/JPH0720640Y2/ja
Publication of JPH02115200U publication Critical patent/JPH02115200U/ja
Application granted granted Critical
Publication of JPH0720640Y2 publication Critical patent/JPH0720640Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
JP2317089U 1989-02-28 1989-02-28 電子線照射装置 Expired - Lifetime JPH0720640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2317089U JPH0720640Y2 (ja) 1989-02-28 1989-02-28 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2317089U JPH0720640Y2 (ja) 1989-02-28 1989-02-28 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH02115200U true JPH02115200U (enrdf_load_stackoverflow) 1990-09-14
JPH0720640Y2 JPH0720640Y2 (ja) 1995-05-15

Family

ID=31241941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2317089U Expired - Lifetime JPH0720640Y2 (ja) 1989-02-28 1989-02-28 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0720640Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0720640Y2 (ja) 1995-05-15

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